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公开(公告)号：EP2439575A1
公开(公告)日：2012-04-11
申请号：EP10783336.0
申请日：2010-05-28
CPC分类号： G02B21/33 , G02B7/16 , G02B21/248 , G02B27/32
摘要： A solid immersion lens supporting device includes a lens holder 30 that holds a solid immersion lens 20 in a free state in which a lens bottom surface 22 protrudes downward through a lower opening 32 so as not to fix the solid immersion lens, and a lens cover 40 which is provided to an upper opening 31 of the lens holder 30, and in which a cover bottom surface 42 on the solid immersion lens 20 side is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surface 21 of the solid immersion lens 20. Further, the lens cover 40 is provided with a positioning portion which is capable of carrying out positioning of the solid immersion lens 20 with respect to the objective lens with reference to an image of the lens cover 40 observed via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.
摘要翻译： 固体浸没透镜支撑装置包括透镜保持器30，该透镜保持器30将透镜底面22向下突出的自由状态保持在下开口32中，以便不固定固体浸没透镜，并且透镜盖 40，其被提供到透镜保持器30的上开口31，并且固体浸没透镜20侧的盖底面42位于与光轴垂直的平面上，透镜盖与 固体浸没透镜20的球面透镜顶面21.此外，透镜盖40设置有能够相对于物镜执行固体浸没透镜20相对于物镜的定位的定位部分 通过物镜观察透镜盖40。 由此，可以实现能够有效地进行将浸没透镜移动，安装和定位到样品上的浸没透镜支撑装置。
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公开(公告)号：EP3998476A1
公开(公告)日：2022-05-18
申请号：EP20836941.3
申请日：2020-05-19
发明人： TERADA Hirotoshi , IWAKI Yoshitaka
IPC分类号： G01N21/956 , G01R31/26 , G01R31/302
摘要： A semiconductor apparatus examination method includes a step of detecting light from a plurality of positions in a semiconductor apparatus (D) and acquiring a waveform corresponding to each of the plurality of positions, a step of extracting a waveform corresponding to a specific timing from the waveform corresponding to each of the plurality of positions and generating an image corresponding to the specific timing based on the extracted waveform, and a step of extracting a feature point based on a brightness distribution correlation value in the image corresponding to the specific timing and identifying a position of a drive element in the semiconductor apparatus based on the feature point.
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公开(公告)号：EP3451040A1
公开(公告)日：2019-03-06
申请号：EP17789066.2
申请日：2017-02-28
摘要： An optical unit (1) includes a relay optical system (5) configured to relay a primary image forming surface of an optical microscope (2) to a secondary image forming surface of a side of an imaging device (3), an optical element holder (6) disposed on an optical axis in the relay optical system (5), a field lens disposition portion (7) configured to dispose a field lens (16) on the optical axis on a front stage side of the optical element holder (6), and a Bertrand lens insertion/extraction portion (8) configured to dispose a Bertrand lens (19) on the optical axis on a rear stage side of the optical element holder (6) so that insertion and extraction of the Bertrand lens are possible.
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公开(公告)号：EP3951467A1
公开(公告)日：2022-02-09
申请号：EP20776660.1
申请日：2020-03-26
摘要： Embodiments are for a confocal microscope unit 1 attached to a connection port PI of a microscope 50 including: light sources 10a to 10d which output irradiation light to a sample M to be observed; photodetectors 13a to 13d which detect observation light generated from a sample in response to the irradiation light; a scan mirror 4 which scans the irradiation light on the sample M and guides the observation light generated from the sample M to the photodetectors 13a to 13d; a scan lens 7 which guides the irradiation light scanned by the scan mirror 4 to the microscope optical system and guides the observation light focused by the microscope optical system to the scan mirror 4; a lens barrel 3 to which the scan lens 7 is fixed; an attachment portion 21 which attaches the lens barrel 3 to the connection port PI; and a movable portion 22 which supports the lens barrel 3 so that an angle of the lens barrel 3 with respect to the attachment portion 21 is changeable.
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5.发明授权SUCTION APPARATUS, SEMICONDUCTOR DEVICE OBSERVATION DEVICE, AND SEMICONDUCTOR DEVICE OBSERVATION METHOD 有权吸附装置，半导体装置观察装置和半导体装置观察方法
公开(公告)号：EP2587529B1
公开(公告)日：2018-01-17
申请号：EP11798145.6
申请日：2011-06-21
IPC分类号： G01N21/95 , H01L21/683 , H01L21/687 , H01L21/66
CPC分类号： G01N21/9501 , G01N21/01 , H01L21/6838 , H01L21/68757 , H01L21/68785 , H01L22/12
摘要： A suction unit 10 includes a main body portion having a first surface 13 on which a semiconductor wafer W formed with a semiconductor device D is arranged and a second surface 14 that is a surface opposite to the first surface 13, and in which a through-hole 15 that penetrates through the first surface 13 and the second surface 14 is formed and a light transmitting portion having a light incident surface 16 onto which light from the semiconductor device D is made incident and a light emitting surface 17 from which light made incident from the light incident surface 16 is emitted, and which is fitted to the through-hole 15. Further, in the first surface 13, a first suction groove 13a for vacuum sucking the semiconductor wafer W to fix the semiconductor device D to the light incident surface 16 is formed, and in the second surface 14, a second suction groove 14a for vacuum sucking the solid immersion lens S to fix the solid immersion lens S to the light emitting surface 17 is formed.
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公开(公告)号：EP2587298A1
公开(公告)日：2013-05-01
申请号：EP11798071.4
申请日：2011-06-17
IPC分类号： G02B21/36
CPC分类号： G01B11/022 , G02B5/001 , G02B21/0016 , G02B21/002
摘要： An image generation device 1 comprises a laser light source 3, a laser output control unit 11, a laser scanner 5, a modulation pattern control unit 15 for such control as to irradiate the object with illumination light having a plurality of spatial modulation patterns, an electric signal detector 7 for detecting an electric signal issued from the object A, an electric signal imaging unit 17 for generating a two-dimensional characteristic image including characteristic distribution information associating illumination position information with characteristic information, and an image data operation unit 19 for generating a pattern image of the object A according to a plurality of characteristic images generated so as to correspond to the plurality of spatial modulation patterns.
摘要翻译： 图像生成装置1具备：激光光源3，激光输出控制部11，激光扫描仪5，用于对被摄体照射具有多个空间调制图案的照明光的控制的调制图案控制部15， 电信号检测器7，用于检测从对象A发出的电信号;电信号成像单元17，用于生成包括将照明位置信息与特征信息相关联的特征分布信息的二维特征图像;以及图像数据操作单元19， 根据生成的多个特征图像来生成对象A的图案图像，以与多个空间调制图案对应。
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7.发明公开
公开(公告)号：EP3904893A1
公开(公告)日：2021-11-03
申请号：EP19904491.8
申请日：2019-10-09
IPC分类号： G01R31/302 , G01R31/26 , H01L23/473
摘要： Provided is a cooling unit to be used in an inspection of a semiconductor device. The cooling unit includes a jacket for dissipating heat of the semiconductor device. The jacket is provided with a light passing portion for passing light from the semiconductor device. The jacket has a space defining surface that faces the semiconductor device and defines a space between the space defining surface and the semiconductor device in a state where the light passing portion faces the semiconductor device. The jacket is provided with a supply flow path through which a fluid to be supplied to the space flows.
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公开(公告)号：EP3832371A1
公开(公告)日：2021-06-09
申请号：EP19845351.6
申请日：2019-04-09
摘要： A solid immersion lens unit includes a solid immersion lens having a contact surface for coming into contact with semiconductor device formed of a silicon substrate and a spherical surface to be disposed to face an objective lens; a holder holding the solid immersion lens; and an optical element held by the holder to be positioned between the objective lens and the solid immersion lens. The solid immersion lens transmits light having at least a part of wavelength in a range of 200 nm or greater and 1100 nm or lower. The optical element corrects aberration caused by a difference in refractive indices between the silicon substrate and the solid immersion lens.
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公开(公告)号：EP2439575B1
公开(公告)日：2017-06-21
申请号：EP10783336.0
申请日：2010-05-28
CPC分类号： G02B21/33 , G02B7/16 , G02B21/248 , G02B27/32
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公开(公告)号：EP3951468A1
公开(公告)日：2022-02-09
申请号：EP20777264.1
申请日：2020-03-26
摘要： A confocal microscope unit 1A according to an embodiment includes: a first subunit 6a which includes a light source 10a, a pinhole plate 12a, and a photodetector 13a; a second subunit 6b which includes a light source 10b, a pinhole plate 12b, and a photodetector 13b; a scan mirror 4 which scans excitation light output from the first and second subunits 6a and 6b on a sample M via a microscope optical system and guides fluorescence generated from the sample M in response to the excitation light and focused by the microscope optical system to the first and second subunits 6a and 6b; and a main housing 2 which is attachable to a connection port PI and to which the scan mirror 4, the first subunit 6a, and the second subunit 6b are fixed, wherein the first subunit 6a and the second subunit 6b are disposed in the main housing 2 so that incident angles of two excitation lights to the scan mirror 4 are displaced from each other by a predetermined angle θ S .
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