公开(公告)号：EP1227315A2

公开(公告)日：2002-07-31

申请号：EP01130203.1

申请日：2001-12-18

申请人： Hitachi, Ltd.

发明人： Ochiai, Isao, Hitachi Ltd., Intell. Prop. Group ,  Shinada, Hiroyuki, Hitachi Ltd., Intell Prop Group ,  Kanda, Kimio, Hitachi Ltd., Intell. Prop. Group

IPC分类号： G01N23/00

CPC分类号： H01J37/244 ,  G01N23/225 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/028 ,  H01J2237/24415 ,  H01J2237/2445

摘要： In a high-sensitivity X-ray detector, an image of the secondary electrons is little shifted and deformed by the astigmatism or the like even when it approaches very close to a specimen (9) set on the stage (235) of an electron microscope. When a beam of charged particles strike a specimen (9), the specimen emits backscattered charged particles along with X-rays. To prevent such undesired charged particles from entering into the X-ray detecting element of the X-ray detector, a means (261, 262) for generating a first magnetic field is applied. Another means (263, 265) for generating a second magnetic field is provided to cancel the magnetic field leaked from the first means for generating magnetic field at the position of the specimen (9).

摘要翻译： 在高灵敏度X射线检测器中，即使当二次电子接近非常靠近设置在电子显微镜的台（235）上的试样（9）时，二次电子的图像几何偏移和变形， 。 当带电粒子束撞击样品（9）时，样品与X射线一起发射反向散射的带电粒子。 为了防止这种不期望的带电粒子进入X射线检测器的X射线检测元件，施加用于产生第一磁场的装置（261,262）。 提供了用于产生第二磁场的另一装置（263,265），以抵消从第一装置泄漏的磁场，用于在试样（9）的位置产生磁场。