摘要:
In order to decrease a resistance component of lead portion (41 - 44) of a pressure sensor, surfaces of the lead portions other than gauge portions (31 - 34), and pad portions (51 - 54) of the pressure sensor are coated directly with a metallic thin film such as aluminum, or at least an acceptor impurity such as boron, potassium, phosphorus, antimony or arsenic, is doped into the lead portions (41 - 44) and the pad portions (51 - 54).
摘要:
In order to decrease a resistance component of lead portion (41 - 44) of a pressure sensor, surfaces of the lead portions other than gauge portions (31 - 34), and pad portions (51 - 54) of the pressure sensor are coated directly with a metallic thin film such as aluminum, or at least an acceptor impurity such as boron, potassium, phosphorus, antimony or arsenic, is doped into the lead portions (41 - 44) and the pad portions (51 - 54).
摘要:
A detector for detecting a physical quantity as a quantity of electricity has a detection portion (1), a portion (2) for stimulating the detection portion and a signal processing portion (4), wherein a calibrating signal is supplied from the signal processing portion (4) to the detection portion (1) via the stimulating portion (2) so as to measure a specific response of the detection portion whereby a self-calibration and a correction of the characteristics are performed in accordance with the amount of the change in the response.
摘要:
A physical quantity detecting apparatus comprises at least one optical fiber (3; 500), at least one light emitting means (1) for emitting an incident light beam on the optical fiber, at least one light receiving means (5) for detecting an outgoing light beam from the optical fiber, physical quantity applied position information generating means (14) for providing information indicative of a position of a portion at which a physical quantity is applied to the optical fiber, and operation means (12; 12a) for receiving signals from the light receiving means and physical quantities applied position information generating means and calculating a change with time in physical quantity at respective positions on the optical fiber.
摘要:
A detector for detecting a physical quantity as a quantity of electricity has a detection portion (1), a portion (2) for stimulating the detection portion and a signal processing portion (4), wherein a calibrating signal is supplied from the signal processing portion (4) to the detection portion (1) via the stimulating portion (2) so as to measure a specific response of the detection portion whereby a self-calibration and a correction of the characteristics are performed in accordance with the amount of the change in the response.
摘要:
The invention relates to a semiconductor strain gauge comprising four piezoresistive elements (10,12,14,16) which include a low impurity concentration diffused portion and a heavily-doped diffused portion. The resistance values of the two low impurity concentration diffused portions opposite to one another are greater than the resistance values of the other two low impurity concentration portions. The resistances of the heavily-doped diffused portions are so selected that the resistances of the piezoresistive elements (10,12,14,16) are equal.