Semiconductor pressure sensor
    1.
    发明公开
    Semiconductor pressure sensor 审中-公开
    Halbleiter-Drucksensor

    公开(公告)号:EP0913678A2

    公开(公告)日:1999-05-06

    申请号:EP98119482.2

    申请日:1998-10-15

    IPC分类号: G01L9/06

    CPC分类号: G01L9/0055

    摘要: In order to decrease a resistance component of lead portion (41 - 44) of a pressure sensor, surfaces of the lead portions other than gauge portions (31 - 34), and pad portions (51 - 54) of the pressure sensor are coated directly with a metallic thin film such as aluminum, or at least an acceptor impurity such as boron, potassium, phosphorus, antimony or arsenic, is doped into the lead portions (41 - 44) and the pad portions (51 - 54).

    摘要翻译: 为了降低压力传感器的引导部分(41-44)的电阻分量,直接涂覆压力传感器的除了测量部分(31-34)和焊盘部分(51-54)之外的引线部分的表面 与金属薄膜如铝或至少一种受主杂质如硼,钾,磷,锑或砷掺杂到引线部分(41-44)和焊盘部分(51-54)中。

    Semiconductor pressure sensor
    2.
    发明公开
    Semiconductor pressure sensor 审中-公开
    半导体压力传感器

    公开(公告)号:EP0913678A3

    公开(公告)日:1999-11-17

    申请号:EP98119482.2

    申请日:1998-10-15

    IPC分类号: G01L9/06

    CPC分类号: G01L9/0055

    摘要: In order to decrease a resistance component of lead portion (41 - 44) of a pressure sensor, surfaces of the lead portions other than gauge portions (31 - 34), and pad portions (51 - 54) of the pressure sensor are coated directly with a metallic thin film such as aluminum, or at least an acceptor impurity such as boron, potassium, phosphorus, antimony or arsenic, is doped into the lead portions (41 - 44) and the pad portions (51 - 54).

    摘要翻译: 为了减小压力传感器的引线部分(41-44)的电阻分量,直接涂覆除量规部分(31-34)之外的引线部分的表面和压力传感器的焊盘部分(51-54) 在引线部分(41-44)和焊盘部分(51-54)中掺入诸如铝之类的金属薄膜或者至少诸如硼,钾,磷,锑或砷之类的受主杂质。

    Detector having self-calibration function
    3.
    发明公开
    Detector having self-calibration function 失效
    Messaufnehmer mit Selbsteichfunktion。

    公开(公告)号:EP0606115A1

    公开(公告)日:1994-07-13

    申请号:EP94103628.7

    申请日:1990-10-11

    申请人: HITACHI, LTD.

    摘要: A detector for detecting a physical quantity as a quantity of electricity has a detection portion (1), a portion (2) for stimulating the detection portion and a signal processing portion (4), wherein a calibrating signal is supplied from the signal processing portion (4) to the detection portion (1) via the stimulating portion (2) so as to measure a specific response of the detection portion whereby a self-calibration and a correction of the characteristics are performed in accordance with the amount of the change in the response.

    摘要翻译: 用于检测物理量作为电量的检测器具有检测部分(1),用于刺激检测部分的部分(2)和信号处理部分(4),其中从信号处理部分提供校准信号 (4)经由刺激部分(2)到检测部分(1),以便测量检测部分的特定响应,从而根据变化量进行自校准和特性校正 响应。

    Physical quantity detecting apparatus and internal combustion engine control apparatus each utilizing optical fiber
    4.
    发明公开
    Physical quantity detecting apparatus and internal combustion engine control apparatus each utilizing optical fiber 失效
    物理量检测装置和内燃机发动机控制装置每个使用光纤。

    公开(公告)号:EP0622622A3

    公开(公告)日:1994-11-23

    申请号:EP94106416.4

    申请日:1994-04-25

    申请人: HITACHI, LTD.

    IPC分类号: G01L23/16 G01L23/22

    摘要: A physical quantity detecting apparatus comprises at least one optical fiber (3; 500), at least one light emitting means (1) for emitting an incident light beam on the optical fiber, at least one light receiving means (5) for detecting an outgoing light beam from the optical fiber, physical quantity applied position information generating means (14) for providing information indicative of a position of a portion at which a physical quantity is applied to the optical fiber, and operation means (12; 12a) for receiving signals from the light receiving means and physical quantities applied position information generating means and calculating a change with time in physical quantity at respective positions on the optical fiber.

    摘要翻译: 安装在内燃机的气缸盖垫片上的压力检测装置包括至少一个光纤(3; 500),至少一个用于在光纤上发射入射光束的发光装置(1),以及至少一个 用于检测来自光纤的出射光束的光接收装置(5)。 位置信息生成装置(14)提供指示沿着光纤的多个位置处施加的压力的位置的信息。 操作装置(12; 12b)根据接收到的位置信息和测量的压力计算各个光纤位置处的压力随时间的变化。 因此,通过使用不同的偏振模式,可以在多个位置处的单个光纤同时感测到不同的物理量(例如温度,压力)。

    Detector having self-calibration function
    5.
    发明公开
    Detector having self-calibration function 失效
    Messaufnehmer mit Selbsteichfunktion。

    公开(公告)号:EP0423622A1

    公开(公告)日:1991-04-24

    申请号:EP90119524.8

    申请日:1990-10-11

    申请人: HITACHI, LTD.

    IPC分类号: G01D18/00

    摘要: A detector for detecting a physical quantity as a quan­tity of electricity has a detection portion (1), a portion (2) for stimulating the detection portion and a signal processing portion (4), wherein a calibrating signal is supplied from the signal processing portion (4) to the detection portion (1) via the stimulating portion (2) so as to measure a specific re­sponse of the detection portion whereby a self-calibration and a correction of the characteristics are performed in accord­ance with the amount of the change in the response.

    摘要翻译: 用于检测物理量作为电量的检测器具有检测部分(1),用于刺激检测部分的部分(2)和信号处理部分(4),其中从信号处理部分提供校准信号 (4)经由刺激部分(2)到检测部分(1),以便测量检测部分的特定响应,从而根据变化量进行自校准和特性校正 响应。

    Semiconductor strain gauge
    7.
    发明公开
    Semiconductor strain gauge 失效
    Halbleiter-Dehnungsmesser。

    公开(公告)号:EP0034807A1

    公开(公告)日:1981-09-02

    申请号:EP81101182.4

    申请日:1981-02-19

    申请人: Hitachi, Ltd.

    IPC分类号: G01L1/18 G01L9/06 H01L29/84

    CPC分类号: G01L9/0054 G01L9/065

    摘要: The invention relates to a semiconductor strain gauge comprising four piezoresistive elements (10,12,14,16) which include a low impurity concentration diffused portion and a heavily-doped diffused portion.
    The resistance values of the two low impurity concentration diffused portions opposite to one another are greater than the resistance values of the other two low impurity concentration portions. The resistances of the heavily-doped diffused portions are so selected that the resistances of the piezoresistive elements (10,12,14,16) are equal.

    摘要翻译: 本发明涉及包括四个压阻元件(10,12,14,16)的半导体应变计,其包括低杂质浓度扩散部分和重掺杂扩散部分。 ...彼此相反的两个低杂质浓度扩散部分的电阻值大于其它两个低杂质浓度部分的电阻值。 选择重掺杂扩散部分的电阻使得压阻元件(10,12,14,16)的电阻相等。