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    CURVED DIFFRACTION GRATING, PRODUCTION METHOD THEREFOR, AND OPTICAL DEVICE
    1.
    发明公开
    CURVED DIFFRACTION GRATING, PRODUCTION METHOD THEREFOR, AND OPTICAL DEVICE 审中-公开
    GEKRÜMMTESBEUGUNGSGITTER，HERSTELLUNGSVERFAHRENDAFÜRUND OPTISCHE VORRICHTUNG

    公开(公告)号：EP2977795A1

    公开(公告)日：2016-01-27

    申请号：EP14770190.8

    申请日：2014-01-30

    申请人： Hitachi High-Technologies Corporation

    发明人： AONO Takanori ,  EBATA Yoshisada ,  MATSUI Shigeru ,  WATANABE Tetsuya

    IPC分类号： G02B5/18 ,  B29C39/10

    CPC分类号： G02B5/1852 ,  G01N21/31 ,  G02B1/04 ,  G02B5/1814 ,  G02B5/1857 ,  G02B5/1861

    摘要： A technique is provided which enables preparation of a curved grating having a desired curvature, by plastically deforming, along a curved substrate, a flat grating prepared by a semiconductor process on a silicon substrate, and which thus prepares a diffraction grating with high accuracy. A silicon flat grating prepared by a semiconductor process is transferred to an amorphous material, and the amorphous material substrate is curved and mounted on a curved fixed substrate, thus providing a curved grating having a crystalline material in which the generation of a dislocation line is restrained.

    摘要翻译： 提供了一种技术，其能够通过在弯曲基板上通过硅衬底上的半导体工艺制备的平坦光栅塑造具有期望曲率的弯曲光栅，从而准备高精度的衍射光栅。 将通过半导体工艺制备的硅平坦光栅转移到非晶材料，并且非晶材料基板弯曲并安装在弯曲的固定基板上，从而提供具有结晶材料的弯曲光栅，其中限制了位错线的产生 。

    CURVED FACE DIFFRACTION GRATING FABRICATION METHOD, CURVED FACE DIFFRACTION GRATING CAST, AND CURVED FACE DIFFRACTION GRATING EMPLOYING SAME
    3.
    发明公开
    CURVED FACE DIFFRACTION GRATING FABRICATION METHOD, CURVED FACE DIFFRACTION GRATING CAST, AND CURVED FACE DIFFRACTION GRATING EMPLOYING SAME 审中-公开
    方法有着弯曲阵线有着弯曲正面和衍射CROOKED前面，所以衍射衍射，模具

    公开(公告)号：EP2860557A1

    公开(公告)日：2015-04-15

    申请号：EP13801434.5

    申请日：2013-06-03

    申请人： Hitachi High-Technologies Corporation

    发明人： AONO Takanori ,  EBATA Yoshisada ,  MATSUI Shigeru ,  WATANABE Tetsuya ,  ONODA Yugo

    IPC分类号： G02B5/18 ,  B29C59/02 ,  B29L11/00

    CPC分类号： G02B5/1847 ,  B29C59/02 ,  B32B37/12 ,  B32B37/24 ,  B32B38/0012 ,  B32B2551/00 ,  G02B5/18 ,  G02B5/1814 ,  G02B5/1852 ,  Y10T156/1028

    摘要： A curved surface diffraction grating fabrication method for fabricating a curved surface diffraction grating having a desired curvature with high accuracy, includes: a step of forming a diffraction grating pattern on a flat-shaped silicon substrate; a step of curving the silicon substrate on which the diffraction grating pattern is formed, by pressing, in a heated state, a fixing substrate having a shape with a desired curved surface onto the silicon substrate and of fixing the silicon substrate on which the diffraction grating pattern is formed to the fixing substrate having the shape with the curved surface, to fabricate a curved surface diffraction grating cast; and a step of bringing a member having flexibility into contact with the curved surface diffraction grating cast, to transfer the diffraction grating pattern to the member.

    摘要翻译： 一种制造曲面衍射光栅具有高精确度的期望的曲率，曲面衍射光栅的制造方法包括：形成一衍射光栅上的平板状的硅基板图案的步骤; 弯曲在其上的衍射光栅图案形成在所述硅衬底上，通过按压在加热状态的步骤，具有所需的弯曲面的形状在硅衬底和固定硅衬底的固定基板在其上的衍射光栅 图案被形成为具有弯曲表面形状的固定基板，以制造曲面衍射光栅铸造; 并且使具有挠性构件与所述曲面衍射光栅铸造接触的步骤，以将衍射光栅图案转移到所述构件。