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公开(公告)号：EP1678556A4
公开(公告)日：2010-01-13
申请号：EP04796270
申请日：2004-10-22
Applicant: IBM
Inventor： HUANG WU-SONG , ALLEN ROBERT D , ANGELOPOULOS MARIE , KWONG RANEE W , SOORIYAKUMARAN RATNAM
IPC: G03C1/76 , G03F20060101 , G03F7/004 , G03F7/075
CPC classification number: G03F7/0757 , G03F7/0045 , G03F7/0046
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