公开(公告)号：EP2108192A4

公开(公告)日：2009-12-30

申请号：EP07855285

申请日：2007-12-20

Applicant: IBM

Inventor： LIU YAOCHANG ,  CHIDAMBARRAO DURESETI ,  RIM KERN ,  GLUSCHENKOV OLEG ,  MO RENEE T ,  HOLT JUDSON R

IPC: H01L27/10 ,  H01L21/336 ,  H01L21/82 ,  H01L21/8238 ,  H01L29/78

CPC classification number: H01L21/823864 ,  H01L21/76886 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/84 ,  H01L27/1203 ,  H01L27/3279 ,  H01L29/165 ,  H01L29/665 ,  H01L29/6656 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/7848