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公开(公告)号:EP2047506A4
公开(公告)日:2012-04-25
申请号:EP07783916
申请日:2007-05-18
Applicant: IBM
Inventor: STANDAERT THEODORUS E , DAVIS PEGEEN M , FITZSIMMONS JOHN A , GRECO STEPHEN E , KO TZE-MAN , LUSTIG NAFTALI E , NICHOLSON LEE M , SANKARAN SUJATHA
IPC: H01L21/4763 , H01L21/768
CPC classification number: H01L21/76808 , H01L21/76805 , H01L21/76814 , H01L21/76846 , H01L2924/0002 , H01L2924/00