-
1.发明公开
公开(公告)号：EP2404316A4
公开(公告)日：2016-04-06
申请号：EP10770142
申请日：2010-04-22
Applicant: IBM
Inventor： GREENE BRIAN J , CHUDZIK MICHAEL P , HAN SHU-JEN , HENSON WILLIAM K , LIANG YUE , MACIEJEWSKI EDWARD P , NA MYUNG-HEE , NOWAK EDWARD J , YU XIAOJUN
IPC: H01L21/8234 , H01L21/28 , H01L21/84 , H01L27/12
CPC classification number: H01L21/823462 , H01L21/28229 , H01L21/84 , H01L27/1203
Search Results
1
records
(took 0.005 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
