公开(公告)号：EP1875516A4

公开(公告)日：2008-08-13

申请号：EP06739771

申请日：2006-03-27

Applicant: IBM

Inventor： CHANG LELAND ,  NARASIMHA SHREESH ,  ROHRER NORMAN J ,  SLEIGHT JEFFREY W

IPC: H01L21/8244 ,  G11C11/412 ,  H01L21/84 ,  H01L27/11 ,  H01L27/12

CPC classification number: H01L27/1104 ,  G11C11/412 ,  H01L21/84 ,  H01L27/11 ,  H01L27/1203 ,  H01L27/1207

Abstract: The present invention provides a 6T-SRAM semiconductintg structure including a substrate having an SOI region and a bulk-Si region, wherein the SOI region and the bulk-Si region have a same or differing crystallographic orientation; an isolation region separating the SOI region from the bulk Si-region; and at least one first device located in the SOI region and at least one second device located in the bulk-Si region. The SOI region has a silicon layer atop an insulating layer. The bulk-Si region further comprises a well region underlying the second device and a contact to the well region, wherein the contact stabilizes floating body effects. The well contact is also used to control the threshold voltages of the FETs in the bulk-Si region to optimized the power and performance of the SRAM cell built from the combination of the SOI and bulk-Si region FETs.

Abstract translation: 本发明提供了一种6T-SRAM半导体结构，其包括具有SOI区和体硅区的衬底，其中SOI区和体硅区具有相同或不同的结晶取向; 隔离SOI区域与体硅区域的隔离区域; 以及位于所述SOI区域中的至少一个第一器件和位于所述体硅区域中的至少一个第二器件。 SOI区域在绝缘层顶上具有硅层。 体硅区还包括位于第二器件下方的阱区和与阱区的接触，其中接触稳定了浮体效应。 阱接触也用于控制体硅区域中的FET的阈值电压，以优化由SOI和体硅区域FET的组合构建的SRAM单元的功率和性能。

公开(公告)号：EP1834350A4

公开(公告)日：2009-06-17

申请号：EP05853245

申请日：2005-12-08

Applicant: IBM

Inventor： CHIDAMBARRAO DURESETI ,  LI YING ,  MALIK RAJEEV ,  NARASIMHA SHREESH ,  YANG HAINING ,  ZHU HUILONG

IPC: H01L21/336 ,  H01L29/78

CPC classification number: H01L29/7843 ,  H01L21/823807 ,  H01L29/66772 ,  Y10S438/938

Abstract: The present invention provides a semiconductor device having dual nitride liners, which provide an increased transverse stress state for at least one FET (300) and methods for the manufacture of such a device. A first aspect of the invention provides a method for use in the manufacture of a semiconductor device comprising the steps of applying a first silicon nitride liner (360) to the device and applying a second silicon nitride liner (370) adjacent the fast silicon nitride liner, wherein at least one of the first and second silicon nitride liners induces a transverse stress in a silicon channel (330) beneath at least one of the first and second silicon nitride liner.

公开(公告)号：EP2409332A4

公开(公告)日：2012-01-25

申请号：EP10753837

申请日：2010-02-11

Applicant: IBM

Inventor： CHOU ANTHONY I ,  FREEMAN GREGORY G ,  MCSTAY KEVIN ,  NARASIMHA SHREESH

IPC: H01L29/739 ,  H01L21/285 ,  H01L21/329 ,  H01L21/33 ,  H01L21/768 ,  H01L27/12

CPC classification number: H01L21/28518 ,  H01L21/76829 ,  H01L29/66356 ,  H01L29/7391