A HYBRID BULK-SOI 6T-SRAM CELL FOR IMPROVED CELL STABILITY AND PERFORMANCE
    4.
    发明公开
    A HYBRID BULK-SOI 6T-SRAM CELL FOR IMPROVED CELL STABILITY AND PERFORMANCE 审中-公开
    HYBRIDE BULK-SOI-6T-SRAM-ZELLEFÜRVERBESSERTEZELLENSTABILITÄTUND-LEISTUNGSFÄHIGKEIT

    公开(公告)号:EP1875516A4

    公开(公告)日:2008-08-13

    申请号:EP06739771

    申请日:2006-03-27

    Applicant: IBM

    Abstract: The present invention provides a 6T-SRAM semiconductintg structure including a substrate having an SOI region and a bulk-Si region, wherein the SOI region and the bulk-Si region have a same or differing crystallographic orientation; an isolation region separating the SOI region from the bulk Si-region; and at least one first device located in the SOI region and at least one second device located in the bulk-Si region. The SOI region has a silicon layer atop an insulating layer. The bulk-Si region further comprises a well region underlying the second device and a contact to the well region, wherein the contact stabilizes floating body effects. The well contact is also used to control the threshold voltages of the FETs in the bulk-Si region to optimized the power and performance of the SRAM cell built from the combination of the SOI and bulk-Si region FETs.

    Abstract translation: 本发明提供了一种6T-SRAM半导体结构,其包括具有SOI区和体硅区的衬底,其中SOI区和体硅区具有相同或不同的结晶取向; 隔离SOI区域与体硅区域的隔离区域; 以及位于所述SOI区域中的至少一个第一器件和位于所述体硅区域中的至少一个第二器件。 SOI区域在绝缘层顶上具有硅层。 体硅区还包括位于第二器件下方的阱区和与阱区的接触,其中接触稳定了浮体效应。 阱接触也用于控制体硅区域中的FET的阈值电压,以优化由SOI和体硅区域FET的组合构建的SRAM单元的功率和性能。

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