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公开(公告)号：EP2022085A4
公开(公告)日：2011-08-03
申请号：EP07755161
申请日：2007-04-10
Applicant: IBM
Inventor： FANG SUNFEI , KNARR RANDOLPH F , KRISHNAN MAHADEVAIYER , LAVOIE CHRISTIAN , MO RENEE T , PRANATHARTHIHARAN BALASUBRAMANIAN , STRANE JAY W
IPC: H01L21/285 , H01L21/3213
CPC classification number: H01L21/28518 , C23F1/28 , C23F1/30 , C23F1/44
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