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公开(公告)号：EP1992012A4
公开(公告)日：2011-08-17
申请号：EP07861255
申请日：2007-03-01
Applicant: IBM
Inventor： YANG CHIH-CHAO , SPOONER TERRY A , VAN DER STRATEN OSCAR
IPC: H01L21/4763
CPC classification number: H01L21/76831 , H01L21/02063 , H01L21/31105 , H01L21/31144 , H01L21/32131 , H01L21/76805 , H01L21/76808 , H01L21/76814 , H01L21/76843 , H01L21/76844 , H01L21/76873 , H01L23/5226 , H01L23/53238 , H01L23/5329 , H01L2924/0002 , H01L2924/00
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2.发明公开STRUCTURE AND METHOD FOR CREATING RELIABLE VIA CONTACTS FOR INTERCONNECT APPLICATIONS 有权结构及其制造方法可靠路径搜索连络人连接的应用程序
公开(公告)号：EP2020027A4
公开(公告)日：2010-12-01
申请号：EP07870667
申请日：2007-05-11
Applicant: IBM
Inventor： YANG CHIH-CHAO , VAN DER STRATEN OSCAR
CPC classification number: H01L21/76834 , H01L21/288 , H01L21/76814 , H01L21/76816 , H01L21/76843 , H01L21/76846 , H01L21/76852 , H01L2924/0002 , H01L2924/00
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