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1.Boride materials for electronic elements and method of preparing the same 失效
标题翻译: 用于电子元件和过程及其制备硼化物材料公开(公告)号:EP0587417B1
公开(公告)日:1997-12-29
申请号:EP93307070
申请日:1993-09-08
发明人: HAMADA KAZUYUKI , WAKATA MITSUNOBU , MATSUURA KIYOTAKA , SUGII NOBUYUKI , KUBO KOHICHI , YAMAUCHI HISAO
IPC分类号: C01G25/00 , C01B35/04 , C01G1/00 , C01G27/00 , C04B35/58 , C30B29/10 , H01L29/26 , H01L39/22 , C30B1/02 , H01L21/34 , H01L39/12
CPC分类号: C04B35/58078 , C04B35/5805 , H01L29/26