公开(公告)号：EP3049787A2

公开(公告)日：2016-08-03

申请号：EP14766464.3

申请日：2014-09-15

申请人： Inficon GmbH

发明人： DECKER, Silvio ,  DAUENHAUER, Michael ,  WETZIG, Daniel ,  HJALMAR, Bruhns

IPC分类号： G01M3/22 ,  G01M3/20 ,  F04B41/06

CPC分类号： F04F5/54 ,  F04F5/22 ,  F04F5/44 ,  G01M3/205 ,  G01M3/229

摘要： The invention relates to a device (10) for evacuating a film chamber (28) using a pump system that comprises at least two vacuum pumps (20, 22), designed to evacuate the film chamber (28) alternately. In said device the suction capacity of the first vacuum pump (20) is greater than that of the second vacuum pump (22) and the final pressure achievable by the first vacuum pump (20) is less than that of the second vacuum pump (22).

公开(公告)号：EP3049787B1

公开(公告)日：2018-10-24

申请号：EP14766464.3

申请日：2014-09-15

申请人： Inficon GmbH

发明人： DECKER, Silvio ,  DAUENHAUER, Michael ,  WETZIG, Daniel ,  HJALMAR, Bruhns

IPC分类号： G01M3/22 ,  G01M3/20 ,  F04B41/06

CPC分类号： F04F5/54 ,  F04F5/22 ,  F04F5/44 ,  G01M3/205 ,  G01M3/229