-
公开(公告)号:EP4420152A1
公开(公告)日:2024-08-28
申请号:EP22836320.6
申请日:2022-10-21
发明人: GOLLER, Bernhard , BINTER, Alexander Christian , HOECHBAUER, Tobias, Franz Wolfgang , HUBER, Martin , MODER, Iris , PICCIN, Matteo , SANTOS RODRIGUEZ, Francisco, Javier , SCHULZE, Hans-Joachim
IPC分类号: H01L21/02 , H01L21/78 , H01L21/306 , H01L21/683
CPC分类号: H01L21/7806 , H01L21/306 , H01L21/6835 , H01L2221/6836820130101