公开(公告)号：EP0399299A2

公开(公告)日：1990-11-28

申请号：EP90108792.4

申请日：1990-05-10

申请人： International Business Machines Corporation

发明人： Angelopoulos, Marie ,  Huang, Wu-Song ,  Kaplan, Richard D. ,  Le Corre, Marie-Annick ,  Perreault, Stanley E. ,  Shaw, Jane M. ,  Tissier, Michel R. ,  Walker, George F.

IPC分类号： H01B1/12

CPC分类号： H05K9/0079 ,  C08G61/12 ,  H01B1/127 ,  H01B1/128 ,  H01J29/868 ,  H01L23/49894 ,  H01L23/60 ,  H01L2924/0002 ,  H05K9/0081 ,  Y10T428/31855 ,  H01L2924/00

摘要： Structures containing conducting polymers and methods of fabrication thereof. Electrical conductivity can be induced in polymers selected from the group consisting of substituted and unsubstituted polyanilines, polypara­phenylenevinylenes, substituted and unsubstituted polythiophenes, substituted and unsubstituted poly-p-­phenylene sulfides, substituted polyfuranes, sub­stituted polypyrroles, substituted polyselenophenes, polyacetylenes formed from soluble precursors, com­binations thereof and blends thereof with other polymers. The polymer contains a doping precursor, selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides. Conductivity can be selectively induced in the polymer by selectively doping upon selective exposure to a source of energy such as electromagnetic radiation, an electron beam and heat. The electrically conductive polymers of the present invention are useful as electron discharge layers for electron beam applications, such as SEM observations, as electromagnetic interference coatings on dielectric surfaces and as an electron beam resist which acts as a discharge layer.

摘要翻译： 含有导电聚合物的结构体及其制造方法。 可以在选自取代和未取代的聚苯胺，聚对亚苯基亚乙烯基，取代和未取代的聚噻吩，取代和未取代的聚对苯硫醚，取代的聚呋喃，取代的聚吡咯，取代的聚硒吩，可溶性前体形成的聚乙炔的聚合物中诱导导电性， 其组合和其与其它聚合物的共混物。 聚合物含有选自鎓盐，碘鎓盐，三氟甲磺酸盐，硼酸盐，甲苯磺酸盐和磺酰氧基酰亚胺的掺杂前体。 通过在选择性地暴露于诸如电磁辐射，电子束和热的能量源之后选择性地掺杂，可以在聚合物中选择性地诱导电导率。 本发明的导电聚合物可用作电子束应用的电子放电层，例如SEM观察，作为电介质表面上的电磁干扰涂层和用作放电层的电子束抗蚀剂。

公开(公告)号：EP0399299A3

公开(公告)日：1991-08-21

申请号：EP90108792.4

申请日：1990-05-10

申请人： International Business Machines Corporation

发明人： Angelopoulos, Marie ,  Huang, Wu-Song ,  Kaplan, Richard D. ,  Le Corre, Marie-Annick ,  Perreault, Stanley E. ,  Shaw, Jane M. ,  Tissier, Michel R. ,  Walker, George F.

IPC分类号： H01B1/12

CPC分类号： H05K9/0079 ,  C08G61/12 ,  H01B1/127 ,  H01B1/128 ,  H01J29/868 ,  H01L23/49894 ,  H01L23/60 ,  H01L2924/0002 ,  H05K9/0081 ,  Y10T428/31855 ,  H01L2924/00

摘要： Structures containing conducting polymers and methods of fabrication thereof. Electrical conductivity can be induced in polymers selected from the group consisting of substituted and unsubstituted polyanilines, polypara­phenylenevinylenes, substituted and unsubstituted polythiophenes, substituted and unsubstituted poly-p-­phenylene sulfides, substituted polyfuranes, sub­stituted polypyrroles, substituted polyselenophenes, polyacetylenes formed from soluble precursors, com­binations thereof and blends thereof with other polymers. The polymer contains a doping precursor, selected from the group consisting of onium salts, iodonium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides. Conductivity can be selectively induced in the polymer by selectively doping upon selective exposure to a source of energy such as electromagnetic radiation, an electron beam and heat. The electrically conductive polymers of the present invention are useful as electron discharge layers for electron beam applications, such as SEM observations, as electromagnetic interference coatings on dielectric surfaces and as an electron beam resist which acts as a discharge layer.