专利检索 ap:("International Business Machines Corporation") AND inv:"LI, Wai-Kim c/o IBM United Kingdom Limited" 第 1 页

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发明授权
Directed self-assembly of block copolymers using segmented prepatterns 有权
标题翻译：嵌段共聚物的定向自组装使用分段初步样品

公开(公告)号：EP2379441B1

公开(公告)日：2012-10-10

申请号：EP10715538.4

申请日：2010-04-23

申请人： International Business Machines Corporation

发明人： CHENG, Joy , NA, Young-Hye , LAI, Kafai , RETTNER, Charles, Thomas , SANDERS, Daniel, Paul , LI, Wai-Kim c/o IBM United Kingdom Limited

IPC分类号： B81C1/00

CPC分类号： B81C1/00031 , B81C1/00404 , B81C2201/0149 , H01L21/0337 , H01L21/31144