公开(公告)号：EP2538544A1

公开(公告)日：2012-12-26

申请号：EP11744482.8

申请日：2011-01-26

申请人： Ishikawa Prefecture ,  Sigma Koki Co., Ltd ,  Nikko Company ,  Tokyo Institute of Technology

发明人： TAKANO Masahiro ,  HIROSAKI Kenichi ,  SHINTANI Ryuji ,  YOSHIDA Yuta ,  MINAMIKAWA Toshiharu ,  NAKANO Kouichi ,  NAGATA Takuya ,  MAKINO Shou ,  ICHIMURA Satoru ,  YOSHIDA Takashi ,  ISHIDA Masayuki ,  KAWAI Hiroshi ,  TAKIMOTO Mikio ,  NAKAMURA Kentaro

IPC分类号： H02N2/00

CPC分类号： H02N2/123 ,  H02N2/103 ,  H02N2/126

摘要： The present invention provides a piezoelectric actuator mechanism that is suited for automatic operation in the adjustment of a mirror holder in an optical system, or in the positioning of a movable table of a linear stage, that has a short entire length, and is capable of performing a compact and high-precision position/angle adjustment and positioning. The piezoelectric actuator mechanism comprises: a screw-driven feeding mechanism that is comprised of a feed screw 11 and a feed screw nut 14; a disc-shaped rotor 17 mounted on the rear-end face of the feed screw nut 14; an ultrasonic motor 18 having a piezoelectric vibrator 19 that comes in contact with the circumference face of the rotor 17; and a driven mounting portion that is pressed against the leading end of the feed screw 11 by spring force, and displaced and positioned by the feeding operation of the feed screw. The driven mounting portion can be made to be a mirror holder 1 to be used in an optical system, or a movable table 21 of a linear stage, for example.

摘要翻译： 本发明提供一种压电致动器机构，其适用于在光学系统中的镜保持器的调节中或在线性台的可移动台的定位中具有短的整体长度的自动操作，并且能够 执行紧凑且高精度的位置/角度调整和定位。 压电致动器机构包括：由进给螺杆11和进给螺母14​​组成的螺杆驱动进给机构; 安装在进给螺母14​​的后端面的盘状转子17; 具有与转子17的周面接触的压电振动器19的超声波马达18; 以及由弹簧力压靠进给螺杆11的前端的从动安装部，通过进给螺杆的进给动作而移位和定位。 驱动安装部分可以制成例如用于光学系统的反射镜保持器1或者线性平台的可移动台21。