MECHANISM COMPRISED OF ULTRASONIC LEAD SCREW MOTOR
    2.
    发明公开
    MECHANISM COMPRISED OF ULTRASONIC LEAD SCREW MOTOR 有权
    从超声LEITSPINDELMOTOR现行机制

    公开(公告)号:EP1784875A2

    公开(公告)日:2007-05-16

    申请号:EP05778277.3

    申请日:2005-08-04

    发明人: HENDERSON, David

    IPC分类号: H01L41/18

    CPC分类号: G02B7/08 H02N2/105 H02N2/126

    摘要: An optical assembly that contains an optical device movably attached to an apparatus for driving a threaded shaft assembly. The apparatus is comprised of a threaded shaft with an axis of rotation and, engaged therewith, a threaded nut. The assembly contains a device for subjecting the threaded nut to ultrasonic vibrations and thereby causing said the shaft to simultaneously rotate and translate in the axial direction.

    An ultrasonic driving device
    3.
    发明公开
    An ultrasonic driving device 失效
    超声波驱动装置

    公开(公告)号:EP0301430A3

    公开(公告)日:1990-02-07

    申请号:EP88111832.7

    申请日:1988-07-22

    发明人: Honda, Keisuke

    IPC分类号: H01L41/08 H02N2/00

    摘要: In the present invention, a stator (4) consists of a piezoelectric vibrator (1) having divided electrodes (2a,2b) on its one end or two end, alternative current voltage is applied to each of the divided electrodes of the one end and one electrode (3) of each of the divided electrodes (3a,3b) of the other end of the stator, and a member to driven is composed on the end or side portion of the stator. The member is reversibly driven by reversible circumferential progressive wave arisen on the end and side portions.

    LINEAR OUTPUT, CLOSED LOOP MOVER ASSEMBLY
    5.
    发明公开
    LINEAR OUTPUT, CLOSED LOOP MOVER ASSEMBLY 审中-公开
    MOVING用协议的线性输出和闭环

    公开(公告)号:EP1624994A1

    公开(公告)日:2006-02-15

    申请号:EP04750390.9

    申请日:2004-04-21

    摘要: A mover assembly (16) that moves or positions an object (12) along a first axis includes a motor (20) and a coupling assembly (22). The motor (20) includes a motor output (332) that is moved along the first axis and about the first axis. The coupling assembly (22) includes a stage (344) that couples the motor output (332) to the object (12) and a stage guide (346) that guides the motion of the stage (344) along the first axis. In one embodiment, the stage guide (346) is a linear bearing that allows for motion of the stage (344) along the first axis and inhibits motion of the stage (344) about the first axis, along a second axis and along a third axis. Additionally, the coupling assembly (22) can include a measurement system (28) that monitors the movement of the stage (344).

    Positioning device
    6.
    发明公开
    Positioning device 审中-公开
    Positionsgerät

    公开(公告)号:EP1513190A1

    公开(公告)日:2005-03-09

    申请号:EP04015992.3

    申请日:2004-07-07

    IPC分类号: H01L21/00 B65G47/00 H01L21/68

    摘要: A positioning device according to the present invention includes a movable body; a position detection unit detecting a position of the movable body; a first and a second vibratory actuator controlled in accordance with a detection output from the position detection unit; a first transmission mechanism comprising a first gear wheel and a first rack engaging the first gear wheel, the first transmission mechanism transmitting a driving force of the first vibratory actuator to the movable body; and a second transmission mechanism comprising a second gear wheel and a second rack engaging the second gear wheel, the second transmission mechanism transmitting a driving force of the second vibratory actuator to the movable body. An engaging position of the first gear wheel with the first rack is different from an engaging position of the second gear wheel with the second rack.

    摘要翻译: 根据本发明的定位装置包括可移动体; 位置检测单元,检测可移动体的位置; 根据来自位置检测单元的检测输出控制的第一和第二振动致动器; 第一传动机构包括第一齿轮和与第一齿轮接合的第一齿条,第一传动机构将第一振动致动器的驱动力传递到可移动体; 以及第二传动机构,其包括与所述第二齿轮接合的第二齿轮和第二齿条,所述第二传动机构将所述第二振动致动器的驱动力传递到所述可移动体。 第一齿轮与第一齿条的接合位置与第二齿轮与第二齿条的接合位置不同。

    MECHANISM COMPRISED OF ULTRASONIC LEAD SCREW MOTOR
    8.
    发明授权
    MECHANISM COMPRISED OF ULTRASONIC LEAD SCREW MOTOR 有权
    机制包括超声波引线螺旋电机

    公开(公告)号:EP1784875B1

    公开(公告)日:2011-11-16

    申请号:EP05778277.3

    申请日:2005-08-04

    发明人: HENDERSON, David

    IPC分类号: H01L41/18 G02B7/04 H01L41/09

    CPC分类号: G02B7/08 H02N2/105 H02N2/126

    摘要: An optical assembly that contains an optical device movably attached to an apparatus for driving a threaded shaft assembly. The apparatus is comprised of a threaded shaft with an axis of rotation and, engaged therewith, a threaded nut. The assembly contains a device for subjecting the threaded nut to ultrasonic vibrations and thereby causing said the shaft to simultaneously rotate and translate in the axial direction.

    摘要翻译: 一种光学组件,其包含可移动地连接到用于驱动螺纹轴组件的设备的光学装置。 该设备包括具有旋转轴线的螺纹轴并且与其接合的是螺纹螺母。 该组件包括用于使螺母承受超声波振动的装置,从而使所述轴同时沿轴向旋转和平移。

    POSITIONIERSYSTEM FÜR EINEN MIKROSTELLTISCH
    9.
    发明授权
    POSITIONIERSYSTEM FÜR EINEN MIKROSTELLTISCH 有权
    定位为微LOCK TABLE

    公开(公告)号:EP2130237B1

    公开(公告)日:2010-10-20

    申请号:EP08801117.6

    申请日:2008-07-28

    发明人: BROMME, Alexander

    IPC分类号: H01L41/09

    CPC分类号: H02N2/126 F16H25/20

    摘要: The invention relates to a positioning system for a microstage, having a DC actuating motor (6) which is coupled to the microstage by means of a threaded spindle (4) and a spindle nut (3). That end of the threaded spindle (4) which is situated opposite the DC actuating motor (6) is provided with a rotary piezo motor (11) which is coupled to the threaded spindle (4) by means of a permanently electromagnetic clutch (10). The DC actuating motor for large actuating paths and the rotary piezo motor for actuating paths in the nanometer range act on the same threaded spindle. When the positioning system is used, the microstage is moved into a technologically predetermined position by the DC actuating motor by means of the ball screw and the permanently electromagnetic clutch is activated in such a way that the rotary piezo motor is directly coupled to the threaded spindle, while the DC actuating motor is uncoupled from the threaded spindle.

    Power line switch device with piezo-electric actuation
    10.
    发明公开
    Power line switch device with piezo-electric actuation 审中-公开
    Stromleitungsschaltvorrichtung mit piezoelektrischerBetätigung

    公开(公告)号:EP1962310A1

    公开(公告)日:2008-08-27

    申请号:EP07003867.4

    申请日:2007-02-26

    申请人: KAMSTRUP A/S

    IPC分类号: H01H3/26 H01H3/30 H01H3/46

    摘要: The invention provides a power line switch device (1) for disconnecting an electric power line (2) in response to a control signal (CS), e.g. to enable remote breaking of electric power supply to a consumer connected to an electric supply net. The switch device (1) includes a power switch for connecting or breaking connection of an electric power line. A switch member serving to switch the power switch between "on" and "off" is actuated by a piezo-electric motor (5) in response to the control signal (CS). A piezo-electric motor can be implemented immune to magnetic fields and is thus suited to provide mechanical energy to reliably drive a power switch in an environment where application of a strong magnetic field may be used to disturb the function of such switch. In preferred embodiments the piezo-electric motor actuates the switch member via a mechanical coupling arrangement (7). This arrangement (7) serves to convert a slow movement provided by the plezo-electric motor (5) to a snap-like movement of the switch member such that contact members (8, 9) are quickly brought in or our of contact thereby eliminating sparks between the contact members (8, 9). Preferably the actuation of the switch member (4) Involves a plurality of repeated movements of the piezo-electric motor (5).

    摘要翻译: 本发明提供了一种用于响应于控制信号(CS)而断开电力线(2)的电力线路开关装置(1)。 以便能够远程断开连接到电网的消费者的电力供应。 开关装置(1)包括用于连接或断开电力线连接的电源开关。 用于在“开”和“关”之间切换电源开关的开关构件由压电马达(5)响应于控制信号(CS)而致动。 压电电动机可以免受磁场的影响,因此适用于提供机械能量,以便可以在施加强磁场的环境中可靠地驱动电力开关来干扰这种开关的功能。 在优选实施例中,压电马达通过机械耦合装置(7)致动开关构件。 这种布置(7)用于将由副电动马达(5)提供的缓慢运动转换成开关构件的卡扣状运动,使得接触构件(8,9)快速进入或接触,从而消除 在接触构件(8,9)之间产生火花。 优选地,开关构件(4)的致动涉及压电马达(5)的多个重复运动。