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公开(公告)号：EP2538544A1
公开(公告)日：2012-12-26
申请号：EP11744482.8
申请日：2011-01-26
发明人： TAKANO Masahiro , HIROSAKI Kenichi , SHINTANI Ryuji , YOSHIDA Yuta , MINAMIKAWA Toshiharu , NAKANO Kouichi , NAGATA Takuya , MAKINO Shou , ICHIMURA Satoru , YOSHIDA Takashi , ISHIDA Masayuki , KAWAI Hiroshi , TAKIMOTO Mikio , NAKAMURA Kentaro
IPC分类号： H02N2/00
摘要： The present invention provides a piezoelectric actuator mechanism that is suited for automatic operation in the adjustment of a mirror holder in an optical system, or in the positioning of a movable table of a linear stage, that has a short entire length, and is capable of performing a compact and high-precision position/angle adjustment and positioning. The piezoelectric actuator mechanism comprises: a screw-driven feeding mechanism that is comprised of a feed screw 11 and a feed screw nut 14; a disc-shaped rotor 17 mounted on the rear-end face of the feed screw nut 14; an ultrasonic motor 18 having a piezoelectric vibrator 19 that comes in contact with the circumference face of the rotor 17; and a driven mounting portion that is pressed against the leading end of the feed screw 11 by spring force, and displaced and positioned by the feeding operation of the feed screw. The driven mounting portion can be made to be a mirror holder 1 to be used in an optical system, or a movable table 21 of a linear stage, for example.
摘要翻译： 本发明提供一种压电致动器机构，其适用于在光学系统中的镜保持器的调节中或在线性台的可移动台的定位中具有短的整体长度的自动操作，并且能够 执行紧凑且高精度的位置/角度调整和定位。 压电致动器机构包括：由进给螺杆11和进给螺母14组成的螺杆驱动进给机构; 安装在进给螺母14的后端面的盘状转子17; 具有与转子17的周面接触的压电振动器19的超声波马达18; 以及由弹簧力压靠进给螺杆11的前端的从动安装部，通过进给螺杆的进给动作而移位和定位。 驱动安装部分可以制成例如用于光学系统的反射镜保持器1或者线性平台的可移动台21。
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公开(公告)号：EP2530825A1
公开(公告)日：2012-12-05
申请号：EP11737019.7
申请日：2011-01-26
发明人： TAKANO Masahiro , HIROSAKI Kenichi , YOSHIDA Yuta , NAGATA Takuya , MAKINO Shou , ICHIMURA Satoru , YOSHIDA Takashi , ISHIDA Masayuki , KAWAI Hiroshi , TAKIMOTO Mikio , NAKAMURA Kentaro
IPC分类号： H02N2/00
CPC分类号： H01L41/0913 , H01L41/047 , H02N2/004
摘要： Electrodes (7, 8, 9), having curved sections in the shape of the outline thereof, are disposed in areas of a rectangular plate-shaped piezoelectric transducer element (1) in which the strain in the natural mode of vibration is large. The eletrodes (7, 8) which excite a bending vibration are disposed in areas in which the strain in the bending natural mode is at least a predetermined value, and the outline curved sections of the electrodes (7, 8) are shaped so as to follow along strain contours (3, 4), and the electrode (9) which excites a stretching vibration is disposed in an area in which the strain in the stretching natural mode is at least a predetermined value, thus providing a transducer for an ultrasonic motor which aims to reduce transducer loss (increasing vibration efficiency), and improve transducer durability and reliability.
摘要翻译： 具有其轮廓形状的弯曲部分的电极（7,8,9）设置在其中自然振动模式下的应变大的矩形板状压电换能器元件（1）的区域中。 激励弯曲振动的电极（7,8）设置在弯曲自然模式中的应变至少为预定值的区域中，并且电极（7,8）的轮廓弯曲部分成形为 遵循应变轮廓（3,4），并且激发伸缩振动的电极（9）设置在拉伸自然模式中的应变至少为预定值的区域中，从而提供用于超声波马达的换能器 旨在减少传感器损耗（提高振动效率），并提高传感器的耐用性和可靠性。
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