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1.发明公开DISCRETE POLARIZATION STATE ROTATABLE COMPENSATOR SPECTROSCOPIC ELLIPSOMETER SYSTEM, AND METHOD OF CALIBRATION 审中-公开与分立的偏振态校准的可旋转补偿器的光谱椭偏仪
公开(公告)号：EP2044404A4
公开(公告)日：2012-10-24
申请号：EP06786916
申请日：2006-07-11
Applicant: J A WOOLLAM CO INC
Inventor： JOHS BLAINE D , HERZINGER CRAIG M , GREEN STEVEN E , HALE JEFFREY S
IPC: G01N21/21
CPC classification number: G01N21/211 , G01N21/274 , G01N2021/213
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