公开(公告)号：EP2798322A4

公开(公告)日：2015-06-17

申请号：EP12861672

申请日：2012-04-06

Applicant: J A WOOLLAM CO INC

Inventor： HERZINGER CRAIG M

IPC: G01J4/00 ,  G01N21/21 ,  G01N21/3581

CPC classification number: G01J4/00 ,  G01N21/211 ,  G01N21/3581

Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).

公开(公告)号：EP2446235A4

公开(公告)日：2014-11-12

申请号：EP10792439

申请日：2010-06-18

Applicant: J A WOOLLAM CO INC ,  UNIV NEBRASKA

Inventor： HERZINGER CRAIG M ,  SCHUBERT MATHIAS M ,  HOFMANN TINO ,  LIPHARDT MARTIN M ,  WOOLLAM JOHN A

IPC: G01N21/21 ,  G01N21/35

CPC classification number: G01N21/3581 ,  G01N21/211 ,  G01N2021/213

公开(公告)号：EP2044404A4

公开(公告)日：2012-10-24

申请号：EP06786916

申请日：2006-07-11

Applicant: J A WOOLLAM CO INC

Inventor： JOHS BLAINE D ,  HERZINGER CRAIG M ,  GREEN STEVEN E ,  HALE JEFFREY S

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01N21/274 ,  G01N2021/213