公开(公告)号：EP1038996A4

公开(公告)日：2002-05-02

申请号：EP99943276

申请日：1999-09-10

申请人： JAPAN SCIENCE & TECH CORP ,  KAWASAKI MASASHI

发明人： KAWASAKI MASASHI ,  KOINUMA HIDEOMI

IPC分类号： B01J19/00 ,  C30B23/02 ,  C40B30/08 ,  C40B40/18 ,  C40B60/14 ,  C30B23/08 ,  H01L21/203

CPC分类号： B01J19/0046 ,  B01J2219/00443 ,  B01J2219/00445 ,  B01J2219/00495 ,  B01J2219/00527 ,  B01J2219/00536 ,  B01J2219/00585 ,  B01J2219/0059 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00659 ,  B01J2219/00689 ,  B01J2219/00745 ,  B01J2219/00747 ,  C30B23/002 ,  C40B30/08 ,  C40B40/18 ,  C40B60/14 ,  Y10S117/90 ,  Y10T117/1004 ,  Y10T117/1008

摘要： A combinatorial molecular layer epitaxy device comprising a pressure-controllable common chamber (22), at least one transferable substrate heating unit (36) having in the common chamber a substrate holder (48) holding at least one substrate and at least one pressure-controllable processing chamber (24, 26, 28) each corresponding to a substrate heating unit, wherein a growth chamber (24) out of processing chambers has a multiple-material supply means for supplying materials to substrates (5) held by each substrate heating unit, a gas supply means for supplying gas onto the surfaces of substrates, and an on-site observation means for observing on-site an epitaxial growth for each monolayer on a substrate surface, whereby forming each temperature-and pressure-controllable vacuum chamber by each substrate heating unit and each processing chamber.

公开(公告)号：EP1102061A4

公开(公告)日：2003-02-05

申请号：EP00927837

申请日：2000-05-22

申请人： JAPAN SCIENCE & TECH CORP ,  RIGAKU DENKI CO LTD

发明人： KOINUMA HIDEOMI ,  KAWASAKI MASASHI ,  OMOTE KAZUHIKO ,  KIKUCHI TETSUO

IPC分类号： G01N23/20 ,  G01N23/207 ,  H01L21/66

CPC分类号： G01N23/207 ,  B01J2219/00527 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00612 ,  B01J2219/00659 ,  B01J2219/00689 ,  B01J2219/00707 ,  B01J2219/00756

摘要： A combinatorial X-ray diffractor, particularly a combinatorial X-ray diffractor which can measure one row of samples among a plurality of samples arranged into a matrix simultaneously by X-ray diffraction. For the purpose of high throughput screening, a plurality of samples (10) are arranged into a row X1, a row X2, a row X3 and a row X4 on a sample stage and samples in each row are measured simultaneously by X-ray diffraction, measured data are processed by an information processor (20), information data useful for the evaluation of thin film material are automatically extracted and arranged and the extracted and arranged information data are displayed on a display apparatus (27).