公开(公告)号：EP1055901A3

公开(公告)日：2001-10-10

申请号：EP00110273.0

申请日：2000-05-22

申请人： JASCO CORPORATION ,  Japan Science and Technology Corporation ,  KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY

发明人： Narita, Yoshihito ,  Hisada, Hideho ,  Miyajima, Tatsuya ,  Saito, Osamu ,  Watanabe, Shinichiro ,  Saito, Shinya ,  Akutsu, Koji ,  Teruyama, Susumu ,  Ohtsu, Motoichi, Kanagawa Academy Science & Tech.

IPC分类号： G01B7/34 ,  G02B21/00 ,  G01N27/00

CPC分类号： G01Q70/12 ,  G01Q10/02 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/06 ,  G01Q60/22 ,  G01Q60/34 ,  G01Q60/38 ,  G01Q70/02 ,  Y10S977/851 ,  Y10S977/872

摘要： A probe microscope (120) for causing a sample (112) and a tip portion (118a) of a probe (118) on the sample side to approach each other, detecting an interaction between the sample (112) and the sample-side probe tip portion (118a), and obtaining surface information of the sample (112) from the interaction, the probe (118) being a flexible needle-like probe; the probe microscope (120) comprises vibrating means (122) for rotating the probe (118) while flexing the tip portion (118a) thereof so as to draw a circle having a size corresponding to an increase and decrease in the interaction between the sample surface (112) and the tip portion (118a), and detecting means (124) for detecting the increase and decrease in the size of the circle drawn by the sample-side probe tip portion (118a) due to the interaction and obtaining information about the distance between the sample (112) and the tip portion (118a).

公开(公告)号：EP1055901B1

公开(公告)日：2003-07-23

申请号：EP00110273.0

申请日：2000-05-22

申请人： JASCO CORPORATION ,  Japan Science and Technology Corporation ,  KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY

发明人： Narita, Yoshihito ,  Hisada, Hideho ,  Miyajima, Tatsuya ,  Saito, Osamu ,  Watanabe, Shinichiro ,  Saito, Shinya ,  Akutsu, Koji ,  Teruyama, Susumu ,  Ohtsu, Motoichi, Kanagawa Academy of Science&Tech.

IPC分类号： G01B7/34 ,  G02B21/00 ,  G01N27/00

CPC分类号： G01Q70/12 ,  G01Q10/02 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/06 ,  G01Q60/22 ,  G01Q60/34 ,  G01Q60/38 ,  G01Q70/02 ,  Y10S977/851 ,  Y10S977/872

公开(公告)号：EP1055901A2

公开(公告)日：2000-11-29

申请号：EP00110273.0

申请日：2000-05-22

申请人： JASCO CORPORATION ,  Japan Science and Technology Corporation ,  KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY

发明人： Narita, Yoshihito ,  Hisada, Hideho ,  Miyajima, Tatsuya ,  Saito, Osamu ,  Watanabe, Shinichiro ,  Saito, Shinya ,  Akutsu, Koji ,  Teruyama, Susumu ,  Ohtsu, Motoichi, Kanagawa Academy Science & Tech.

IPC分类号： G01B7/34

CPC分类号： G01Q70/12 ,  G01Q10/02 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/06 ,  G01Q60/22 ,  G01Q60/34 ,  G01Q60/38 ,  G01Q70/02 ,  Y10S977/851 ,  Y10S977/872

摘要： In a probe microscope 120 for causing a sample 112 and a tip portion 118a of a probe 118 on the sample side to approach each other, detecting an interaction between the sample 112 and the sample-side probe tip portion 118a, and obtaining surface information of the sample 112 from the interaction, the probe 118 being a flexible needle-like probe; the probe microscope 120 comprises vibrating means 122 capable of rotating the probe 118 while flexing the sample-side tip portion 118a thereof so as to draw a circle having a size corresponding to an increase and decrease in the interaction between the sample surface 112 and the tip portion 118a, and detecting means 124 for detecting the increase and decrease in the size of the circle drawn by the sample-side probe tip portion 118a due to the interaction and obtaining, from the increase and decrease in the size of the circle, information about the distance between the sample 112 and the sample-side probe tip portion 118a.

摘要翻译： 在探针显微镜120中，使试样侧的探针118的试样112和尖端部118a接近，检测试样112与试样侧探针尖端部118a的相互作用，得到表面信息 来自相互作用的样本112，探针118是柔性针状探针; 探测显微镜120包括振动装置122，该振动装置能够在弯曲探针118的样本侧尖端部分118a的同时旋转探针118，从而绘制具有与样本表面112和尖端之间的相互作用的增加和减小相对应的尺寸的圆 部分118a和检测装置124，该检测装置124用于检测由于相互作用引起的由样本侧探针尖端部分118a画出的圆的大小的增大和减小，并且从圆的大小的增加和减小获得关于 样本112与样本侧探针尖端部分118a之间的距离。