公开(公告)号：EP2602611B1

公开(公告)日：2019-08-21

申请号：EP12196334.2

申请日：2012-12-10

申请人： Jasco Corporation

发明人： Kanomata, Takeshi ,  Horikawa, Yoshiteru ,  Kikuchi, Shinichi

IPC分类号： G01N21/03 ,  G01N21/05 ,  G01N21/64 ,  G01N30/74 ,  B01D15/40

公开(公告)号：EP3299861A1

公开(公告)日：2018-03-28

申请号：EP17193165.2

申请日：2017-09-26

申请人： Jasco Corporation

发明人： Aizawa, Kento ,  Inoue, Tsutomu

IPC分类号： G02B21/00

CPC分类号： G02B21/0032 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/44 ,  G02B21/0064

摘要： The object of the present invention is to detect a good Raman scattering light and to provide a confocal Raman microscope with high analysis accuracy.
The confocal Raman microscope (10) of the present invention comprises:
a light source (11) that emits an excitation light; an excitation light irradiation means (1) that irradiates the excitation light onto a sample (18); a focusing means (3) that focuses Raman scattering light from the light scattered from the sample (18) by using a confocal aperture (20); and a detecting means (26) that detects the focused Raman scattering light,
wherein the excitation light irradiating means (1) comprises an excitation light shaping means (13) that shapes the cross section of the excitation light into an approximate annular shape, and
the focusing means (3) comprises a shielding means (22) that focuses the light of an approximate central part of the cross section among the light that passed the confocal aperture (20) and shields the light of the outer part of the cross section.

摘要翻译： 本发明的目的是检测良好的拉曼散射光并提供分析精度高的共焦拉曼显微镜。 本发明的共焦拉曼显微镜（10）包括：发射激发光的光源（11） 激发光照射装置（1），其将激发光照射到样本（18）上; 聚焦装置（3），其通过使用共焦孔径（20）聚焦来自从样品（18）散射的光的拉曼散射光; 和检测所述聚焦拉曼散射光的检测装置（26），其中所述激发光照射装置（1）包括将所述激发光的横截面成形为近似环形形状的激发光成形装置（13），并且所述 聚焦装置（3）包括屏蔽装置（22），该屏蔽装置（22）将通过共焦孔（20）的光中的横截面的大致中心部分的光聚焦并遮蔽横截面外部的光。

公开(公告)号：EP2420819A2

公开(公告)日：2012-02-22

申请号：EP11162340.1

申请日：2011-04-13

申请人： Jasco Corporation ,  Jasco International Co., Ltd.

发明人： Nagoshi, Toshiyuki ,  Koshoubu, Jun ,  Watanabe, Mitsuo ,  Inoue, Takashi ,  Ito, Shigeru

IPC分类号： G01N11/14

CPC分类号： G01N11/142 ,  G01N2011/008 ,  G01N2203/0092

摘要： Measuring apparatus comprises a rotating plate 17, a torque detection plate 18 disposed on a same axis parallel to the plate 17 with a given gap, a torque sensor about the plate 18 through the specimen held between two plates. The plate 18 is a total reflection prism which is made from a material that has a greater refractive index than the specimen and transmits UV and infrared light. An ultraviolet beam is directed onto the specimen through the prism. An infrared beam is directed into the prism. The infrared beam emerging from the prism after total reflection from the interface between the prism and the specimen is detected. A signal processor analyzes the infrared absorption spectrum of the specimen on the basis of the infrared beam. While the viscosity of the specimen in the curing process is measured, the signal processor simultaneously measures the infrared absorption spectrum.

摘要翻译： 测量装置包括旋转板17，以与给定间隙平行于板17的同一轴线设置的扭矩检测板18，通过保持在两个板之间的试样围绕板18的扭矩传感器。 板18是由具有比样品更大的折射率的材料制成的透射紫外线和红外光的全反射棱镜。 紫外光束通过棱镜被引导到样品上。 红外光束被引导到棱镜中。 检测从棱镜与样品之间的界面全反射后从棱镜出射的红外光束。 信号处理器基于红外光束分析样品的红外吸收光谱。 当测量固化过程中样品的粘度时，信号处理器同时测量红外吸收光谱。

公开(公告)号：EP1895282A1

公开(公告)日：2008-03-05

申请号：EP07114668.2

申请日：2007-08-21

申请人： JASCO CORPORATION

发明人： Wada, Akio ,  Hasegawa, Katsuji ,  Masago, Hisashi ,  Takenouchi, Takahiko ,  Watanabe, Masayuki ,  Kondo, Yoshiro ,  Fukazawa, Tomoyuki

IPC分类号： G01J3/14 ,  G02B27/28

CPC分类号： G01J3/14 ,  G01J3/0224 ,  G02B27/281 ,  G03F7/70566 ,  G03F7/70575

摘要： A polarizing monochromator (10) comprising a uniaxial birefringent crystal prism (20), the prism has the geometry of a triangular block having a triangular base, a face including a side of the hypotenuse is an input-output face, where light enters and exits, and a face including the longer side of the right angle is a reflection face, the optic axis of the prism is perpendicular to the base of the prism, the angle of the input-output face of the prism with respect to light coming from a collimator optical system (18) is determined in such a manner that ordinary light and extraordinary light exit from the input output face of the prism in opposite directions with respect to an optical axis connecting the collimator optical system and the prism, and a light-collecting optical system (22) is disposed to collect either extraordinary light or ordinary light exiting from the input-output face of the prism.

摘要翻译： 一种包括单轴双折射晶体棱镜（20）的偏振单色仪（10），棱镜具有三角形基座的几何形状，包括斜边侧面的面是输入输出面，光入射 并且包括直角的长边的面是反射面，棱镜的光轴垂直于棱镜的基部，棱镜的输入 - 输出面相对于来自于棱镜的光的角度 准直光学系统（18）以普通的光和异常光相对于连接准直仪光学系统和棱镜的光轴相反方向从棱镜的输入输出面离开的方式被确定，并且采集光 光学系统（22）设置成收集从棱镜的输入 - 输出面出射的非凡光或普通光。

公开(公告)号：EP1055907A2

公开(公告)日：2000-11-29

申请号：EP00110432.2

申请日：2000-05-16

申请人： JASCO CORPORATION ,  Japan Science and Technology Corporation ,  KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY

发明人： Narita, Yoshihito, c/o Jasco Corporation ,  Hisada, Hideho, c/o Jasco Corporation ,  Ohtsu, Motoichi, Kanagawa Acad. of Science & Tech.

IPC分类号： G01C3/08

CPC分类号： G01B11/026 ,  G01C3/08

摘要： A rangefinder 10 comprises a light source 12 for emitting a luminous flux L1 having a predetermined beam diameter; interfering means 14 which is an object having an optical axis substantially perpendicular to a direction in which the object to be measured can be dislocated, the interfering means 14 having a transmission type diffraction grating 20 as one object for splitting the luminous flux L1 from the light source 12 into two diffraction luminous fluxes L2, L3 having respective directions different from each other, the two diffraction luminous fluxes L2, L3 being caused to impinge on a reflection type diffraction grating 22 as the other object, respective reflection luminous fluxes L2, L3 thereof being superposed on each other again by the transmission type diffraction grating 20 so as to interfere with each other; detecting means 16 for photoelectrically detecting interference light L4 obtained by the interfering means 14; and signal processing means 18 for measuring an intensity change and interference period of an interference signal obtained by the detecting means 16, and determining the dislocation of the object 22, 24 to be measured with reference to the reference object 20 from the intensity change and interference period of the interference signal.

摘要翻译： 测距仪10包括用于发射具有预定光束直径的光通量L1的光源12; 干涉装置14是一个物体，该物体的光轴基本垂直于被测物体的错位方向，干涉装置14具有一个透射型衍射光栅20作为一个物体，用于从光中分离出光通量L1 光源12分别成为相互不同的方向的2个衍射光束L2，L3，使2个衍射光束L2，L3入射到作为另一个物体的反射型衍射光栅22上，并且将各自的反射光束L2，L3 通过透射型衍射光栅20再次相互叠加以相互干涉; 检测装置16，用于光电检测由干涉装置14获得的干涉光L4; 以及信号处理装置18，用于测量由检测装置16获得的干涉信号的强度变化和干扰周期，并从强度变化和干涉确定参考参考物体20测量的物体22,24的位移 干扰信号的周期。

公开(公告)号：EP0650030B1

公开(公告)日：1999-05-12

申请号：EP95100378.9

申请日：1990-09-24

申请人： MITSUBISHI DENKI KABUSHIKI KAISHA ,  JASCO CORPORATION

发明人： Nishizawa, Seizi, c/o JASCO Corp. ,  Takahashi, Tokuzi, ,  Fukazawa, Ryoichi, c/o Yoshida, Yoshitake & Arita ,  Hattori, Ryo, c/o Mitsubishi Denki K.K.

IPC分类号： G01B11/06

CPC分类号： G01B11/0675

公开(公告)号：EP0826957A1

公开(公告)日：1998-03-04

申请号：EP96306274.0

申请日：1996-08-29

申请人： JASCO CORPORATION

发明人： Miyazaki, Tadashi ,  Kawasaki, Kazuhiro

IPC分类号： G01N21/37 ,  G01N21/35

CPC分类号： G01N21/3504 ,  G01N21/37

摘要： A gas analyzing apparatus comprises: a light source (34) emitting an infrared luminous flux; a sample cell (38) which is arranged such that a sample gas is introduced therein and the infrared luminous flux emitted from the light source (34) is transmitted therethrough; and detection means (10a) which contains an absorber and is arranged such that the infrared luminous flux transmitted through the sample cell (38) passes through the absorber.
An increase in pressure, according to the temperature within an absorber container raised upon absorption of the infrared luminous flux by the absorber, is optically detected so as to measure, based on the increase in pressure, a concentration of an ingredient to be measured in the sample gas; wherein, as the absorber contained in the detection means (10a), a gas having an ingredient identical to the ingredient to be measured is used; particularly high sensitivity being obtainable by the provision of at least two detection means (10a,10b) containing gases having respective ingredients identical to different ingredients to be measured in the sample gas.

摘要翻译： 气体分析装置包括：发射红外光通量的光源（34）; 将样品气体引入其中并从光源（34）发射的红外光束透射的样品池（38）; 以及检测装置（10a），其包含吸收体并且被布置成使得透过所述样品池（38）的红外光束通过所述吸收体。 根据由吸收体吸收红外光束而升高的吸收器容器内的温度的压力的增加被光学检测，以便基于压力的增加来测量待测量的成分的浓度 样气; 其特征在于，作为所述检测机构（10a）中所含的吸收体，使用与成分成分相同的成分的气体， 可以通过提供至少两个检测装置（10a，10b）来获得特别高的灵敏度，所述检测装置包含具有与样品气体中待测量的不同成分相同成分的气体的气体。

公开(公告)号：EP0636865A3

公开(公告)日：1995-05-17

申请号：EP94305516.0

申请日：1994-07-26

申请人： JASCO CORPORATION

发明人： Yamura, Hiroaki, c/o Jasco Corporation ,  Kikuchi, Shin-ichi, c/o Jasco Corporation ,  Kanomata, Takeshi, c/o Jasco Corporation

IPC分类号： G01J3/10 ,  H01J61/82

CPC分类号： F21V29/67 ,  F21V19/04 ,  F21V29/74 ,  G01J3/02 ,  G01J3/0286 ,  G01J3/10 ,  G03B21/2026 ,  H01J61/86

摘要： A lamp unit is provided with a projecting portion (128) on the inner wall of a lamphouse (118) in the vicinity of the arc portion (120) of a lamp (110). The lamphouse is ventilated by a fan (122) provided at one end of the lamphouse and a vent (126) provided at the other end. The inner diameter of the lamphouse at the arc portion provided with the projecting portion is smaller than that of the end portions, so that the flow velocity of the air passing through the lamphouse is higher in the vicinity of the arc portion. Even if the lamp (110) is horizontally installed, which lowers the heat dissipation efficiency, since the lamp (110) is adequately air-cooled, an extreme temperature rise is prevented. Furthermore a magnet is provided in the vicinity of the lamp to stabilize the arc of the horizontal arc lamp. As a bulb material for the lamp, quartz glass having a low transmission below 220nm is used. A cartridge (of e.g. ceramic) permits easy replacement of the lamp unit.

摘要翻译： 灯单元在灯（110）的弧形部分（120）附近在灯室（118）的内壁上设置有突出部分（128）。 灯室由设在灯室一端的风扇（122）通风，另一端设有通风口（126）。 设置有突出部的弧形部的灯室的内径小于端部的灯室的内径，使得通过灯室的空气的流速在弧部附近较高。 即使灯（110）水平地安装，这降低了散热效率，因为灯（110）被充分地冷却，所以防止了极端的温度上升。 此外，在灯附近设置磁体以稳定水平电弧灯的电弧。 作为灯的灯泡材料，使用低于220nm的低透射率的石英玻璃。 盒（例如陶瓷）允许容易地更换灯单元。

公开(公告)号：EP0438184B1

公开(公告)日：1994-10-05

申请号：EP91104018.6

申请日：1988-01-15

申请人： JASCO CORPORATION

发明人： Saito, Muneo ,  Yamauchi, Yoshio ,  Kashiwazaki, Hiromi ,  Sugawara, Michiaki ,  Hondo, Toshinobu

IPC分类号： G01N30/32 ,  G01N30/28

CPC分类号： B01D11/0203 ,  B01D11/028 ,  G01N30/02 ,  G01N30/32 ,  G01N30/74 ,  G01N30/80 ,  G01N2030/062 ,  G01N2030/085 ,  G05D16/2013 ,  Y10T137/7761 ,  B01D15/40

摘要： A pressure control apparatus is used in an apparatus for effecting extraction, chromatographic separation, and fractionation. The pressure control apparatus is intended to reduce the amount of a fluid stagnating in a valve, and is arranged to cyclically open and close the valve, thereby controlling the level of pressure. An apparatus for effecting extraction, chromatographic separation, and fractionation is designed to perform in an on-line manner the extraction of soluble components contained in a sample as well as the separation and fractionation of the components. A chromatography is connected to a downstream side of a supercritical fluid extraction device, and the aforesaid pressure control apparatus is used as back-pressure regulators (9, 18) for the chromatography and the extraction device. An extraction fluid and an elution fluid which are used in a mobile phase may be a common fluid (Fig. 1) or separate fluids (Fig. 10). At the time of extraction, the soluble components of the sample within an extraction vessel (6) is extracted by a supercritical fluid, and is delivered to an adsorption column (14). The supercritical fluid is converted into a gas by reducing the pressure within the adsorption column and thus the solubility of the fluid is lowered so that the resultant extract is adsorbed by an adsorbent packed in this column. At the time of chromatographic separation, the pressure within the adsorption column (14) is maintained at a critical pressure or higher and thus an extract is eluted by the supercritical fluid and is delivered to a separation column (16), in which the extract is separated into individual components. Then, when the pressure within the adsorption column is reduced, the supercritical fluid is gasified and the result components are collected as fractions.

公开(公告)号：EP0567745A3

公开(公告)日：1994-01-19

申请号：EP93103680.0

申请日：1993-03-08

申请人： MITSUBISHI DENKI KABUSHIKI KAISHA ,  JASCO CORPORATION

发明人： Hattori, Ryo, c/o Mitsubishi Denki K.K. ,  Nishizawa , Seizi, Jasco Corporation ,  Takahashi, Tokuji, Jasco Corporation ,  Fukasawa, Ryoichi, Jasco Corporation

IPC分类号： G01B11/06

CPC分类号： G01B11/0675

摘要： An apparatus for measuring a semiconductor layer thickness includes a light source emitting light for measurement, an interferometer emitting interference light modulated with time by applying modulation to the light from the light source, an optical system including a light transmission member for introducing the interference light into a measurement sample comprising at least one-layer film laminated on a substrate, light receiving means receiving interference light reflected from the laminated film of the sample, means for extracting only a film interference component from the reflected interference light and means for calculating a thickness of the laminated film from an interference intensity waveform of the film interference component. The receiving means comprises a plurality of photodetectors having respective photometric wavenumber ranges some parts of which are overlapped with each other. Thereby, a wavenumber range of the sum of the respective wavenumber ranges of the respective components is obtained as a whole wavenumber range and an optical measurement can be realized in a wide wavenumber range which could not be measured with a single material in each component.

摘要翻译： 用于测量半导体层厚度的设备包括：发射用于测量的光的光源，干涉仪通过对来自光源的光施加调制而发射随时间调制的干涉光，光学系统包括用于将干涉光引入 测量样品，其包括层叠在基板上的至少一层膜，接收从样品的层压膜反射的干涉光的光接收装置，仅从反射的干涉光中提取膜干涉成分的装置和用于计算 根据膜干涉成分的干涉强度波形的层叠膜。 接收装置包括多个光检测器，它们各自的光度波数范围的一部分彼此重叠。 由此，各成分的各波数范围的总和的波数范围作为整体的波数范围而得到，能够在各成分中不能用单一材料测定的宽波数范围内进行光学测定。