Electrode configuration for pivotable MEMS micromirror
    2.
    发明公开
    Electrode configuration for pivotable MEMS micromirror 有权
    Elektrodenkonfigurationfürkippbaren MEMS Mikrospiegel

    公开(公告)号:EP1479646A2

    公开(公告)日:2004-11-24

    申请号:EP04405316.3

    申请日:2004-05-21

    申请人: JDS Uniphase Inc.

    摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

    摘要翻译: 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链在其中部附近枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相对轴线枢转地安装,仅具有相对的 它们之间的空气间隙很小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。

    Electrode configuration for pivotable MEMS micromirror
    3.
    发明公开
    Electrode configuration for pivotable MEMS micromirror 审中-公开
    Elektridenkonfigurationfürkippbaren MEMS Mikrospiegel

    公开(公告)号:EP2218677A1

    公开(公告)日:2010-08-18

    申请号:EP10002913.1

    申请日:2004-05-21

    申请人: JDS Uniphase, Inc

    摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

    摘要翻译: 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”型MEMs装置包括通过扭转铰链在其中部附近枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度,由此这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相对轴线枢转地安装,仅具有相对的 它们之间的空气间隙很小。 在为波长切换应用专门设计的本发明的优选实施例中,通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜,这确保了多个相邻的反射镜装置具有高的填充因子, 而不必依靠复杂而昂贵的制造工艺。

    Electrode configuration for pivotable MEMS micromirror
    4.
    发明公开
    Electrode configuration for pivotable MEMS micromirror 有权
    可旋转MEMS微镜的电极配置

    公开(公告)号:EP1479646A3

    公开(公告)日:2005-01-05

    申请号:EP04405316.3

    申请日:2004-05-21

    申请人: JDS Uniphase Inc.

    摘要: A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

    摘要翻译: 公开了一种用于光开关的微机电(MEMs)镜装置。 “钢琴”式MEMS装置包括通过扭转铰链枢转地安装在其中部附近的细长平台。 平台的中间部分和扭转铰链具有小于平台其余部分的宽度的组合宽度,由此这些“钢琴”MEM装置中的几个可以被定位成彼此相邻且绕相同的轴线枢转地安装, 它们之间的小气隙。 在为波长切换应用而特别设计的本发明的优选实施例中,通过使平台围绕两个垂直轴线旋转来提供安装在其上的镜子的更大范围的弓形运动。 根据本发明的优选实施例的MEMS反射镜装置通过使用“内部”万向环结构使得反射镜能够围绕两个垂直轴倾斜,这确保了多个相邻反射镜装置具有高填充因子, 而不必依赖复杂且昂贵的制造工艺。

    Hermetic package with optical fiber feedthrough
    5.
    发明公开
    Hermetic package with optical fiber feedthrough 审中-公开
    Hermetisch dichte Verpackung mitDurchführungfüreine optische Faser

    公开(公告)号:EP1237022A1

    公开(公告)日:2002-09-04

    申请号:EP02250911.1

    申请日:2002-02-11

    申请人: JDS Uniphase Inc.

    发明人: Jin, Wenlin

    IPC分类号: G02B6/36 G02B6/42 H01L31/0203

    摘要: A hermetically sealed package (36) for an electro-optical device has a two-part casing (10,12) with a fiber feedthrough. The feedthrough defines a gap (30) and is assembled using fastening means (18), typically bolts or screws, that are placed such that the walls of the feedthrough are prestressed before a molten solder (32) is injected into the feedthrough to seal the casing (10,12). Due to a volume expansion during solidification the solder exerts a pressure on the casing parts (10,12) and the fibres (27) inserted into the feedthrough. The material of the bolts (18) has a greater coefficient of thermal expansion (CTE) than the CTE of the casing (10,12), whereby the mismatching between the CTE of the casing (10,12) and the solder (32) is at least partly compensated.

    摘要翻译: 用于电光装置的密封封装具有带有纤维馈通的两部分壳体。 馈通限定了间隙,并且使用紧固装置(通常是螺栓或螺钉)进行组装,所述紧固装置通常是螺栓或螺钉,其被放置成使得在将熔融焊料注入馈通以密封外壳之前对馈通壁预应力。 螺栓的材料比壳体的CTE具有更大的热膨胀系数(CTE),从而至少部分地补偿了壳体的CTE与焊料之间的不匹配。