公开(公告)号：EP1479647A2

公开(公告)日：2004-11-24

申请号：EP04405318.9

申请日：2004-05-21

申请人： JDS Uniphase Inc.

发明人： Miller, John Michael ,  Ma, Yuan ,  Keyworth, Barrie ,  Mala, Mohiuddin ,  McKinnon, Graham

IPC分类号： B81B7/02 ,  B81B7/04 ,  G02B26/08 ,  G02B6/35

CPC分类号： G02B6/357 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/356 ,  G02B6/3584 ,  G02B26/0841

摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding (41,42) can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.

摘要翻译： 公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链在其中部附近枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此这些“钢琴”MEM装置中的几个可以彼此相邻地定位成围绕相同的轴线枢转地安装，仅具有相对的 它们之间的空气间隙很小。 在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子， 而不必依靠复杂而昂贵的制造工艺。 为了限制相邻反射镜之间的电串扰量，屏蔽层（41,42）可以位于电极之间。 屏蔽层可以从基板向上延伸和/或从反射镜的下表面向下延伸。 当提供两种类型的屏蔽时，一组彼此偏移以防止其邻接，并且能够实现重叠效果，这增强了保护。

公开(公告)号：EP2218677A1

公开(公告)日：2010-08-18

申请号：EP10002913.1

申请日：2004-05-21

申请人： JDS Uniphase, Inc

发明人： Miller, John Michael ,  Ma, Yuan ,  Keyworth, Barrie ,  Jin, Wenlin ,  Hess, David R.

IPC分类号： B81B7/02 ,  B81B7/04 ,  G02B26/08 ,  G02B6/35 ,  B81B7/00

CPC分类号： G02B6/3584 ,  B81B3/0062 ,  B81B2201/042 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/356 ,  G02B6/357

摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

摘要翻译： 公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链在其中部附近枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相对轴线枢转地安装，仅具有相对的 它们之间的空气间隙很小。 在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子， 而不必依靠复杂而昂贵的制造工艺。

公开(公告)号：EP1479647A3

公开(公告)日：2005-01-05

申请号：EP04405318.9

申请日：2004-05-21

申请人： JDS Uniphase Inc.

发明人： Miller, John Michael ,  Ma, Yuan ,  Keyworth, Barrie ,  Mala, Mohiuddin ,  McKinnon, Graham

IPC分类号： B81B7/02 ,  B81B7/04 ,  G02B26/08 ,  G02B6/35 ,  B81B7/00

CPC分类号： G02B6/357 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/356 ,  G02B6/3584 ,  G02B26/0841

摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding (41,42) can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.

公开(公告)号：EP1479647B1

公开(公告)日：2009-02-25

申请号：EP04405318.9

申请日：2004-05-21

申请人： JDS Uniphase Inc.

发明人： Miller, John Michael ,  Ma, Yuan ,  Keyworth, Barrie ,  Mala, Mohiuddin ,  McKinnon, Graham

IPC分类号： B81B7/02 ,  B81B7/04 ,  G02B26/08 ,  G02B6/35 ,  B81B7/00

CPC分类号： G02B6/357 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/356 ,  G02B6/3584 ,  G02B26/0841

公开(公告)号：EP1479646A3

公开(公告)日：2005-01-05

申请号：EP04405316.3

申请日：2004-05-21

申请人： JDS Uniphase Inc.

发明人： Miller, John Michael ,  Ma, Yuan ,  Keyworth, Barrie ,  Jin, Wenlin ,  Hess, David R.

IPC分类号： B81B7/02 ,  B81B7/04 ,  G02B26/08 ,  G02B6/35 ,  B81B7/00

CPC分类号： G02B6/3584 ,  B81B3/0062 ,  B81B2201/042 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/356 ,  G02B6/357

摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

摘要翻译： 公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”式MEMS装置包括通过扭转铰链枢转地安装在其中部附近的细长平台。 平台的中间部分和扭转铰链具有小于平台其余部分的宽度的组合宽度，由此这些“钢琴”MEM装置中的几个可以被定位成彼此相邻且绕相同的轴线枢转地安装， 它们之间的小气隙。 在为波长切换应用而特别设计的本发明的优选实施例中，通过使平台围绕两个垂直轴线旋转来提供安装在其上的镜子的更大范围的弓形运动。 根据本发明的优选实施例的MEMS反射镜装置通过使用“内部”万向环结构使得反射镜能够围绕两个垂直轴倾斜，这确保了多个相邻反射镜装置具有高填充因子， 而不必依赖复杂且昂贵的制造工艺。

公开(公告)号：EP1479646B1

公开(公告)日：2010-04-28

申请号：EP04405316.3

申请日：2004-05-21

申请人： JDS Uniphase Inc.

发明人： Miller, John Michael ,  Ma, Yuan ,  Keyworth, Barrie ,  Jin, Wenlin ,  Hess, David R.

IPC分类号： B81B7/02 ,  B81B7/04 ,  G02B26/08 ,  G02B6/35 ,  B81B7/00

CPC分类号： G02B6/3584 ,  B81B3/0062 ,  B81B2201/042 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/356 ,  G02B6/357

公开(公告)号：EP1479646A2

公开(公告)日：2004-11-24

申请号：EP04405316.3

申请日：2004-05-21

申请人： JDS Uniphase Inc.

发明人： Miller, John Michael ,  Ma, Yuan ,  Keyworth, Barrie ,  Jin, Wenlin ,  Hess, David R.

IPC分类号： B81B7/02 ,  B81B7/04 ,  G02B26/08 ,  G02B6/35

CPC分类号： G02B6/3584 ,  B81B3/0062 ,  B81B2201/042 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/356 ,  G02B6/357

摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A "piano"-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these "piano" MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an "internal" gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.

摘要翻译： 公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链在其中部附近枢转地安装的细长平台。 平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相对轴线枢转地安装，仅具有相对的 它们之间的空气间隙很小。 在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。 根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子， 而不必依靠复杂而昂贵的制造工艺。