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1.COMPOSITION FOR FORMING LOWER LAYER FILM AND PATTERN FORMING METHOD 审中-公开
Title translation: 形成组合物的下层膜和方法成形结构公开(公告)号:EP1995636A4
公开(公告)日:2010-01-27
申请号:EP07738617
申请日:2007-03-14
Applicant: JSR CORP
Inventor: YOSHIMURA NAKAATSU , KONNO YOUSUKE , SUGITA HIKARU , TAKAHASHI JUNICHI
IPC: G03F7/11 , G03F7/09 , H01L21/027
CPC classification number: G03F7/091 , G03F7/094 , G03F7/11 , Y10S430/106
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2.METHOD OF FORMING PATTERN, COMPOSITION FOR FORMING UPPER-LAYER FILM, AND COMPOSITION FOR FORMING LOWER-LAYER FILM 审中-公开
Title translation: 一种用于形成结构,组成用于形成顶部层薄膜和组合物形成薄膜层公开(公告)号:EP2048541A4
公开(公告)日:2010-12-01
申请号:EP07791450
申请日:2007-07-27
Applicant: JSR CORP
Inventor: SUGITA HIKARU , MATSUMURA NOBUJI , SHIMIZU DAISUKE , KAI TOSHIYUKI , SHIMOKAWA TSUTOMU
CPC classification number: G03F7/11 , G03F7/0045 , G03F7/0757 , G03F7/265
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3.METHOD OF FORMING PATTERN AND COMPOSITION FOR FORMING OF ORGANIC THIN-FILM FOR USE THEREIN 审中-公开
Title translation: 一种用于形成结构和成分上以形成有机发光薄膜的使用中出现公开(公告)号:EP2034364A4
公开(公告)日:2010-12-01
申请号:EP07767364
申请日:2007-06-21
Applicant: JSR CORP
Inventor: SHIMIZU DAISUKE , SUGITA HIKARU , MATSUMURA NOBUJI , KAI TOSHIYUKI , SHIMOKAWA TSUTOMU
CPC classification number: C07D333/18 , G03F7/0045 , G03F7/0757 , G03F7/265
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