-
1.发明公开
公开(公告)号：EP1985725A3
公开(公告)日：2012-03-21
申请号：EP08104906.6
申请日：2004-07-29
发明人： Yahagi, Masataka , Takami, Hideo
CPC分类号： G11B7/243 , C04B35/01 , C04B35/16 , C04B35/457 , C04B2235/3284 , C04B2235/3286 , C04B2235/3293 , C04B2235/3409 , C04B2235/3418 , C23C14/086 , C23C14/3414 , G11B7/2531 , G11B7/257 , G11B7/259 , G11B7/266 , G11B2007/25706 , G11B2007/25708
摘要： A method of manufacturing an optical information recording medium by forming a thin film in a part of an optical information recording medium by the use of a sputtering target formed from a material obtained by adding B 2 O 3 to an In 2 O 3 -ZnO-SnO 2 system compound oxide having SnO 2 as its primary component, wherein the sputtering target is formed from oxide composed with the respective element ratios being In/(In + Zn + Sn + B) = 0.01 to 0.41, Zn/(In + Zn + Sn + B) = 0.02 to 0.45, Sn/(In + Zn + Sn + B) = 0.13 to 0.81, and B/(In + Zn + Sn + B) = 0.09 to 0.66.
-
公开(公告)号：EP2028287B1
公开(公告)日：2012-08-22
申请号：EP08104905.8
申请日：2004-07-29
发明人： Takami, Hideo , Yahagi, Masataka
CPC分类号： G11B7/243 , C04B35/01 , C04B35/16 , C04B35/457 , C04B2235/3284 , C04B2235/3286 , C04B2235/3293 , C04B2235/3409 , C04B2235/3418 , C23C14/086 , C23C14/3414 , G11B7/2531 , G11B7/257 , G11B7/259 , G11B7/266 , G11B2007/25706 , G11B2007/25708
摘要： A sputtering target formed from a material obtained by adding any one or both of SiO 2 and B 2 O 3 oxides to an In 2 O 3 -ZnO-SnO 2 system compound oxide having SnO 2 as its primary component. The present invention relates to a thin film for an optical information recording medium (especially used as a protective film) that has stable film amorphous nature, realizes high deposition speed, is superior in adhesiveness and mechanical properties with the recording layer, has a high transmission factor, and is composed with a non-sulfide system, whereby the deterioration of the adjacent reflective layer and recording layer can be suppressed. The present invention also relates to a manufacturing method of such a thin film, and a sputtering target for use therein. Accordingly, in addition to improving the performance of the optical information recording medium, the productivity can also be considerably improved.
-
3.发明授权Thin film in anoptical information recording medium and process for producing the same 有权在光学信息记录介质及其制造方法薄层其
公开(公告)号：EP1985725B1
公开(公告)日：2013-04-10
申请号：EP08104906.6
申请日：2004-07-29
发明人： Yahagi, Masataka , Takami, Hideo
CPC分类号： G11B7/243 , C04B35/01 , C04B35/16 , C04B35/457 , C04B2235/3284 , C04B2235/3286 , C04B2235/3293 , C04B2235/3409 , C04B2235/3418 , C23C14/086 , C23C14/3414 , G11B7/2531 , G11B7/257 , G11B7/259 , G11B7/266 , G11B2007/25706 , G11B2007/25708
摘要： A sputtering target formed from a material obtained by adding any one or both of SiO 2 and B 2 O 3 oxides to an In 2 O 3 -ZnO-SnO 2 system compound oxide having SnO 2 as its primary component. The present invention relates to a thin film for an optical information recording medium (especially used as a protective film) that has stable film amorphous nature, realizes high deposition speed, is superior in adhesiveness and mechanical properties with the recording layer, has a high transmission factor, and is composed with a non-sulfide system, whereby the deterioration of the adjacent reflective layer and recording layer can be suppressed. The present invention also relates to a manufacturing method of such a thin film, and a sputtering target for use therein. Accordingly, in addition to improving the performance of the optical information recording medium, the productivity can also be considerably improved.
-
-
搜索结果
3 条记录 (耗时 0.01 秒)
