THERMALLY ACTUATED MICROVALVE ASSEMBLY
    3.
    发明公开
    THERMALLY ACTUATED MICROVALVE ASSEMBLY 有权
    热动的微型阀装置

    公开(公告)号:EP1266142A2

    公开(公告)日:2002-12-18

    申请号:EP01920419.7

    申请日:2001-03-16

    摘要: A microvalve device for controlling fluid flow in a fluid circuit (10). The microvalve device comprises a body (12) having a cavity formed therein. The body further has first (20) and second (22) pilot ports placed in fluid communication with the cavity. The body also has first (28) and second (30) primary ports placed in fluid communication with the cavity. Each port is adapted for connection with a designated fluid source. A pilot valve (36) supported by the body is movably disposed in the cavity for opening and closing the first and second pilot ports. An actuator (38) is operably coupled to the pilot valve for moving the pilot valve. A microvalve (40) is positioned by the fluid controlled by the pilot valve. The microvalve is a slider valve having a first end (40a) and a second end (40b). The slider valve is movably disposed in the cavity for movement between a first position and a second position. The first end of the slider valve is in fluid communication with the first and second pilot ports when the first and second pilot ports are open. The second end of the slider valve is in constant fluid communication with the first primary port. When moving between the first and second positions, the slider valve at least partially blocks and unblocks the second primary port for the purpose of variably restricting fluid flow between the primary ports.

    THERMALLY ACTUATED MICROVALVE ASSEMBLY
    4.
    发明授权
    THERMALLY ACTUATED MICROVALVE ASSEMBLY 有权
    热动的微型阀装置

    公开(公告)号:EP1266142B1

    公开(公告)日:2006-11-15

    申请号:EP01920419.7

    申请日:2001-03-16

    摘要: A microvalve device for controlling fluid flow in a fluid circuit (10). The microvalve device comprises a body (12) having a cavity formed therein. The body further has first (20) and second (22) pilot ports placed in fluid communication with the cavity. The body also has first (28) and second (30) primary ports placed in fluid communication with the cavity. Each port is adapted for connection with a designated fluid source. A pilot valve (36) supported by the body is movably disposed in the cavity for opening and closing the first and second pilot ports. An actuator (38) is operably coupled to the pilot valve for moving the pilot valve. A microvalve (40) is positioned by the fluid controlled by the pilot valve. The microvalve is a slider valve having a first end (40a) and a second end (40b). The slider valve is movably disposed in the cavity for movement between a first position and a second position. The first end of the slider valve is in fluid communication with the first and second pilot ports when the first and second pilot ports are open. The second end of the slider valve is in constant fluid communication with the first primary port. When moving between the first and second positions, the slider valve at least partially blocks and unblocks the second primary port for the purpose of variably restricting fluid flow between the primary ports.

    MICROMACHINED STRUCTURE USABLE IN PRESSURE REGULATING MICROVALVE AND PROPORTIONAL MICROVALVE
    5.
    发明公开
    MICROMACHINED STRUCTURE USABLE IN PRESSURE REGULATING MICROVALVE AND PROPORTIONAL MICROVALVE 有权
    在微阀,压力控制和比例阀MICRO;适用微机械结构

    公开(公告)号:EP1415210A1

    公开(公告)日:2004-05-06

    申请号:EP02763398.1

    申请日:2002-07-31

    IPC分类号: G05D16/04 F15C5/00

    摘要: A microvalve device includes a first plate, a second plate and a third plate. The second plate is connected beetween the first plate and the third plate. The second plate contains a stationary element and a moveable plate valve slider element. The slider element variably restricts the flow of a fluid through the microvalve device. The second plate defines a first supply port, an output conduit, and a return port. In a pressure increase position, the slider element allows the fluid to flow from the first supply port to the output conduit. In a pressure hold position, the slider element isolates the output conduit from both the first supply port and the return port. The pressure decrease position allows fluid to flow from the output conduit to the return port. Pressure from the output conduit acts against a first axial end face of the slider element. In a pressure regulating valve embodiment of the microvalve device, the second axial end face of the slider element (opposite the first axial end face) is acted upon by a spring, with the position of the slider element being determined by a balancing of the force exerted by the spring and the force exerted by the fluid acting against the first axial end face. In a proportional microvalve embodiment of the microvalve device, the second axial end face of the slider element (opposite the first axial end face) is acted upon by pressurized fluid in a control chamber, with the position of the slider element being determined by a balancing of the force exerted by the fluid acting against the first axial end face and the force exerted by the fluid acting against the second axial end face. Prefarbaly, a buffer piston extends axially from the first axial end face.

    MICROMACHINED STRUCTURE USABLE IN PRESSURE REGULATING MICROVALVE AND PROPORTIONAL MICROVALVE
    6.
    发明授权
    MICROMACHINED STRUCTURE USABLE IN PRESSURE REGULATING MICROVALVE AND PROPORTIONAL MICROVALVE 有权
    在微阀,压力控制和比例阀MICRO;适用微机械结构

    公开(公告)号:EP1415210B1

    公开(公告)日:2006-08-30

    申请号:EP02763398.1

    申请日:2002-07-31

    IPC分类号: G05D16/04 F15C5/00

    摘要: A microvalve device includes a first plate, a second plate and a third plate. The second plate is connected beetween the first plate and the third plate. The second plate contains a stationary element and a moveable plate valve slider element. The slider element variably restricts the flow of a fluid through the microvalve device. The second plate defines a first supply port, an output conduit, and a return port. In a pressure increase position, the slider element allows the fluid to flow from the first supply port to the output conduit. In a pressure hold position, the slider element isolates the output conduit from both the first supply port and the return port. The pressure decrease position allows fluid to flow from the output conduit to the return port. Pressure from the output conduit acts against a first axial end face of the slider element. In a pressure regulating valve embodiment of the microvalve device, the second axial end face of the slider element (opposite the first axial end face) is acted upon by a spring, with the position of the slider element being determined by a balancing of the force exerted by the spring and the force exerted by the fluid acting against the first axial end face. In a proportional microvalve embodiment of the microvalve device, the second axial end face of the slider element (opposite the first axial end face) is acted upon by pressurized fluid in a control chamber, with the position of the slider element being determined by a balancing of the force exerted by the fluid acting against the first axial end face and the force exerted by the fluid acting against the second axial end face. Prefarbaly, a buffer piston extends axially from the first axial end face.