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公开(公告)号：EP2745313A4
公开(公告)日：2014-12-24
申请号：EP12823553
申请日：2012-07-30
Applicant: KLA TENCOR CORP
Inventor： MANASSEN AMNON , KANDEL DANIEL , BARUCH MOSHE , LEVINSKI VLADIMIR , SAPIENS NOAM , SELIGSON JOEL L , HILL ANDY , BACHAR OHAD , NEGRI DARIA , ZAHARAN OFER
CPC classification number: G03F7/70633
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