公开(公告)号：EP2583300A4

公开(公告)日：2015-09-02

申请号：EP11796320

申请日：2011-06-14

Applicant: KLA TENCOR CORP

Inventor： HILL ANDREW V ,  MANASSEN AMNON ,  KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SELIGSON JOEL ,  SVIZHER ALEXANDER ,  WANG DAVID Y ,  ROTTER LAWRENCE D ,  DE VEER JOHANNES D

IPC: G01N21/47 ,  G03F7/20

CPC classification number: G02B27/141 ,  G01N21/474 ,  G01N21/4788 ,  G01N2021/4792 ,  G02B27/145 ,  G03F7/70633

Abstract: Systems and methods for discrete polarization scatterometry are provided.

公开(公告)号：EP2386114A4

公开(公告)日：2017-10-25

申请号：EP10729404

申请日：2010-01-04

Applicant: KLA-TENCOR CORP

Inventor： ADEL MICHAEL E ,  MANASSEN AMNON ,  KANDEL DANIEL

IPC: G03F7/20 ,  H01L21/66

CPC classification number: G03F7/70683 ,  G03F7/705 ,  G03F7/70633 ,  H01L22/12

Abstract: A metrology target design may be optimized using inputs including metrology target design information, substrate information, process information, and metrology system information. Acquisition of a metrology signal with a metrology system may be modeled using the inputs to generate one or more optical characteristics of the metrology target. A metrology algorithm may be applied to the characteristics to determine a predicted accuracy and precision of measurements of the metrology target made by the metrology system. Part of the information relating to the metrology target design may be modified and the signal modeling and metrology algorithm may be repeated to optimize the accuracy and precision of the one or more measurements. The metrology target design may be displayed or stored after the accuracy and precision are optimized.

公开(公告)号：EP2724361A4

公开(公告)日：2015-03-18

申请号：EP12803940

申请日：2012-06-07

Applicant: KLA TENCOR CORP

Inventor： MANASSEN AMNON ,  SELIGSON JOEL ,  SAPIENS NOAM

IPC: H01L21/027 ,  G01J1/42 ,  G02B26/06 ,  G02B26/08 ,  G02B27/00

CPC classification number: G01J1/4257 ,  G02B21/0016 ,  G02B21/082 ,  G02B21/365 ,  G02B26/0833 ,  G03F7/70633

Abstract: An optical system may include an objective, a source of illumination, an illumination system having illumination optics configured to direct the illumination onto the objective, and at least two dynamic optical array devices located at a pupil conjugate plane and a field conjugate plane, respectively in the illumination optics. The dynamic optical array devices are configured to control one or more properties of illumination coupled from the illumination system to the objective.

公开(公告)号：EP2474027A4

公开(公告)日：2013-03-20

申请号：EP10814430

申请日：2010-09-01

Applicant: KLA TENCOR CORP

Inventor： KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SVIZHER ALEXANDER ,  SELIGSON JOEL ,  HILL ANDREW ,  BACHAR OHAD ,  MANASSEN AMNON ,  CHUANG YUNG-HO ALEX ,  SELA ILAN ,  MARKOWITZ MOSHE ,  NEGRI DARIA ,  ROTEM EFRAIM

IPC: G01N21/956

CPC classification number: G01N21/47 ,  G01B11/02 ,  G01B11/0641 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4792 ,  G01N2201/06113 ,  G01N2201/105 ,  G03F7/70625 ,  G03F7/70633

Abstract: Various metrology systems and methods are provided.

公开(公告)号：EP2959503A4

公开(公告)日：2016-10-26

申请号：EP14753960

申请日：2014-02-21

Applicant: KLA TENCOR CORP

Inventor： BRADY GREGORY ,  SHCHEGROV ANDREI V ,  ROTTER LAWRENCE D ,  SHAUGHNESSY DERRICK ,  SHCEMELININ ANATOLY ,  BEZEL ILYA ,  ARAIN MUZAMMIL ,  VASILIEV ANATOLY ,  ALLEN JAMES ,  SHULEPOV OLEG ,  HILL ANDREW ,  BACHAR OHAD ,  MARKOWITZ MOSHE ,  ISH-SHALOM YARON ,  SELA ILAN ,  MANASSEN AMNON ,  SVIZHER ALEXANDER ,  KHOKHLOV MAXIM ,  ABRAMOV AVI ,  TSIBULEVSKY OLEG ,  KANDEL DANIEL ,  GHINOVKER MARK

IPC: H01L21/66 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G02B6/293 ,  G02B6/35

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 用于向用于光学测量的测量头提供照明的系统被配置为组合来自多个照明源的照明光束以将一个或多个所选波长的照明传送到测量头。 控制传递到测量头的照明的强度和/或空间相干性。 在一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。

公开(公告)号：EP2745313A4

公开(公告)日：2014-12-24

申请号：EP12823553

申请日：2012-07-30

Applicant: KLA TENCOR CORP

Inventor： MANASSEN AMNON ,  KANDEL DANIEL ,  BARUCH MOSHE ,  LEVINSKI VLADIMIR ,  SAPIENS NOAM ,  SELIGSON JOEL L ,  HILL ANDY ,  BACHAR OHAD ,  NEGRI DARIA ,  ZAHARAN OFER

IPC: H01L21/66 ,  G03F7/20

CPC classification number: G03F7/70633