公开(公告)号：EP2837031A4

公开(公告)日：2015-11-18

申请号：EP13775490

申请日：2013-04-08

申请人： KLA TENCOR CORP

发明人： CHERN JEHN-HUAR ,  EHSANI ALI R ,  DELGADO GILDARDO ,  BROWN DAVID L ,  CHUANG YUNG-HO ALEX ,  FIELDEN JOHN

IPC分类号： H01L27/146 ,  G01N21/95

CPC分类号： H01L31/0216 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  H01L27/1462 ,  H01L27/1464 ,  H01L27/14685 ,  H01L27/14806

摘要： An image sensor for short-wavelength light and charged particles includes a semiconductor membrane, circuit elements formed on one surface of the semiconductor membrane, and a pure boron layer on the other surface of the semiconductor membrane. This image sensor has high efficiency and good stability even under continuous use at high flux for multiple years. The image sensor may be fabricated using CCD (charge coupled device) or CMOS (complementary metal oxide semiconductor) technology. The image sensor may be a two-dimensional area sensor, or a one-dimensional array sensor. The image sensor can be included in an electron-bombarded image sensor and/or in an inspection system.