公开(公告)号：EP1025511A4

公开(公告)日：2002-09-11

申请号：EP98955139

申请日：1998-10-27

Applicant: KLA TENCOR CORP

Inventor： HARDIKAR MANOJ ,  ZHOU STEVE ,  SHIFLETT RICHARD ,  KULKARNI ASHOK

IPC: G06F9/44 ,  G06F17/27 ,  G06F17/50 ,  G06Q10/00 ,  G06T11/20 ,  H01L21/02 ,  H01L21/66 ,  G06F17/00 ,  G06F17/18 ,  G06F17/30 ,  G06F19/00

CPC classification number: G06F17/2725 ,  G06F17/277 ,  G06Q10/06

Abstract: A software system and method for creating analytical graphics including bar charts with greater flexibility in an object-oriented Window® environment. The software is particularly applicable to analyzing production data in semiconductor quality control (830). The user (850) customizes the analytical tools by selecting production parameters from a dialog box, and creates flowcharts on the computer display representing the sequence of production variables and production functions previously selected (840). The software is set up with a macro program (840) recording function to remember the production keystrokes previously selected. The analytical sequence represented by the flowchart (870) is automatically executed whenever it is selected by the user, or this sequence can be preprogrammed to run at specified intervals in the future (870). Thus, the user (850) can automatically generate reports of production data (860) on a regular basis to a particular output device, such as a printer, server, or computer screen, or alert an operator by e-mail or paging systems.

公开(公告)号：EP1025512A4

公开(公告)日：2005-01-19

申请号：EP98956236

申请日：1998-10-27

Applicant: KLA TENCOR CORP

Inventor： HARDIKAR MANOJ ,  ZHOU STEVE ,  SHIFLETT RICHARD ,  KULKARNI ASHOK

IPC: G06F9/44 ,  G06F17/27 ,  G06F17/50 ,  G06Q10/00 ,  G06T11/20 ,  H01L21/02 ,  H01L21/66 ,  G06F17/00 ,  G06F17/18 ,  G06F17/30 ,  G06F19/00

CPC classification number: G06F17/2725 ,  G06F17/277 ,  G06Q10/06

Abstract: A software system is used for extending classification attributes in the analysis of production data. The Recipe Editor (810) permits the user to create a Recipe Framework (820). The recipe is applied to the DataSet Framework (830) through the Application Modules (840), and with the Graphic User Interface (GUI) Framework (850), a Page (860) is produced in the Window format. The Recipe Framework (820) also interfaces with the Scheduler and Event Service (870), providing automatic execution and publication of production data analyses at future specified times. The software operates in an object-oriented Windows environment with increased flexibility because it permits the user to add defect classifications by dragging and dropping with a computer mouse. When a cluster classification is executed, a production map is filtered to remove the non-defect data according to selected classification; the defect attribute is then readily visible.

公开(公告)号：EP2195834A4

公开(公告)日：2017-12-27

申请号：EP08831947

申请日：2008-09-22

Applicant: KLA-TENCOR CORP

Inventor： BHASKAR KRIS ,  BHASKAR CHETANA ,  KULKARNI ASHOK ,  ROSENGAUS ELIEZER ,  CAMPOCHIARO CECELIA ,  MAHER CHRIS ,  DUFFY BRIAN ,  KHULLAR ANEESH ,  KOHLI ALPA ,  BALASUBRAMANIAN LALITA ,  BHATTACHARYYA SANTOSH ,  MAHADEVAN MOHAN

IPC: H01L21/66 ,  G06T1/20 ,  G06T7/00

CPC classification number: G06T7/001 ,  G06T1/20 ,  G06T2207/30148

Abstract: Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

公开(公告)号：EP2283516A4

公开(公告)日：2013-01-16

申请号：EP09747486

申请日：2009-05-13

Applicant: KLA TENCOR CORP

Inventor： KULKARNI ASHOK ,  BHATTACHARYYA SANTOSH

IPC: H01L21/66 ,  G05B19/418

CPC classification number: G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  H01L22/12 ,  H01L22/20 ,  H01L2924/0002 ,  Y02P90/22 ,  H01L2924/00