公开(公告)号：EP2960933A4

公开(公告)日：2016-10-19

申请号：EP14754208

申请日：2014-02-24

申请人： KYOCERA CORP

发明人： ONO HIROSHI

IPC分类号： H01L21/683 ,  B23K1/00 ,  B23K1/20 ,  C04B37/02 ,  H01L21/67 ,  H01L21/687 ,  H02N13/00

CPC分类号： H01L21/68757 ,  C04B37/025 ,  C04B37/026 ,  C04B2235/3286 ,  C04B2235/963 ,  C04B2237/06 ,  C04B2237/12 ,  C04B2237/123 ,  C04B2237/124 ,  C04B2237/125 ,  C04B2237/127 ,  C04B2237/366 ,  C04B2237/402 ,  C04B2237/52 ,  C04B2237/555 ,  C04B2237/592 ,  C04B2237/595 ,  C04B2237/66 ,  C04B2237/708 ,  C04B2237/72 ,  H01L21/67109 ,  H01L21/6831

摘要： A sample holder includes a substrate composed of ceramics, having a sample holding surface provided in an upper face thereof; a supporting member composed of metal, an upper face of the supporting member covering a lower face of the substrate; and a joining layer composed of indium or an indium alloy, the substrate and the supporting member being joined to each other via the joining layer. The joining layer has a layer region in at least one of a joining surface to the substrate and a joining surface to the supporting member, a content percentage of indium oxides of the layer region being higher than that of an intermediate region in a thickness direction of the joining layer.