公开(公告)号：EP2140226A2

公开(公告)日：2010-01-06

申请号：EP08757972.8

申请日：2008-04-24

申请人： Klocke, Volker

发明人： KLOCKE, Volker

IPC分类号： G01B21/20 ,  G01B21/04 ,  H01J37/26 ,  B21J19/00 ,  B25J15/00 ,  G01N13/10 ,  G12B21/22

CPC分类号： G01Q10/02 ,  G01B21/04 ,  G01Q10/04 ,  G01Q30/04 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/2025 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/28

摘要： The invention relates to a nanorobot module with a measuring device for measuring spatial surface properties with a measuring in the centimetre range and a resolution in the nanometre range which can be arranged in a vacuum chamber, for example, the vacuum chamber of a microscope. In addition to the integration of the nanorobot module in a vacuum chamber, the invention further relates to the automation of the module in the chamber system, in particular, the connection of the control of the nanorobot system and chamber system by providing an interface between both systems. The invention also relates to a mechatronic exchange adapter for the flexible fixing of nanorobot modules within a vacuum chamber, in particular an exchange adapter which preferably connects a nanorobot module in a working stage and mechanically locates the same with high precision without play.

摘要翻译： 一种具有用于测量空间表面性质的测量装置的纳米机器人模块，其具有在厘米范围内的测量范围和纳米范围内的分辨率，其可以布置在真空室中，例如显微镜的真空室中。 随着将纳米机器人模块集成到真空室中，本公开还涉及腔室系统中的模块的自动化，特别是通过提供纳米机器人系统的控制器与腔室系统的连接， 两个系统。 最后，本发明涉及用于在真空室内灵活固定纳米机器人模块的机电一体式交换适配器，特别地，本发明涉及一种交换适配器，其优选地在一个过程中电连接纳米机器人模块并机械地固定它，使得它是 引导高精度，不发挥。