公开(公告)号：EP1955348B1

公开(公告)日：2017-07-12

申请号：EP06837663.1

申请日：2006-11-15

Applicant: Carl Zeiss Microscopy, LLC

Inventor： WARD, Billy, W. ,  NOTTE, John, A., IV ,  FARKAS III, Louis, S. ,  PERCIVAL, Randall, G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard

IPC: H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B81B1/00 ,  G01N23/225

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

公开(公告)号：EP2293319B1

公开(公告)日：2015-10-28

申请号：EP09770068.6

申请日：2009-06-11

Applicant: Hitachi High-Technologies Corporation

Inventor： TERADA, Shohei ,  TANIGUCHI, Yoshifumi

IPC: H01J37/20 ,  G01N23/04 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/201 ,  H01J2237/20264 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/2802

公开(公告)号：EP1982408A4

公开(公告)日：2012-08-01

申请号：EP07794320

申请日：2007-02-08

Applicant: HYSITRON INC

Inventor： WARREN ODEN L ,  ASIF S A SYED ,  CYRANKOWSKI EDWARD ,  KOUNEV KALIN

IPC: H02N1/08

CPC classification number: G01B7/22 ,  G01D5/2417 ,  G01N3/42 ,  G01N2203/0051 ,  G01N2203/0286 ,  G01N2203/0617 ,  G01Q30/02 ,  G01Q60/366 ,  H01J2237/20264 ,  H02N1/002

Abstract: An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit. -

公开(公告)号：EP2416344A2

公开(公告)日：2012-02-08

申请号：EP11183110.3

申请日：2006-11-15

Applicant: Alis Corporation

Inventor： Edinger, Klaus ,  Markwort, Lars ,  Mantz, Ulrich ,  Ward, Billy W. ,  Notte, John A. ,  Farkas, Louis ,  Percival, Randall ,  Hill, Raymond ,  Aderhold, Dirk

IPC: H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B82Y10/00 ,  H01J27/26 ,  H01J37/20

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample.

Abstract translation: 本发明涉及一种方法，其包括以下步骤：提供具有三至二十个原子的端子架的导电尖端，通过使气体与导电尖端相互作用而产生第一离子束，提供离子光学系统 通过离子光学系统消除第一离子束中的一些离子以产生第二离子束，所述第二离子束包括70％或更多的离子，其经由气体与导电尖端的端子架的一个原子的相互作用而产生， 以及使第二离子束与活化气体相互作用以促进样品表面的化学反应。

公开(公告)号：EP2051281A3

公开(公告)日：2010-06-02

申请号：EP08166727.1

申请日：2008-10-16

Applicant: The Regents Of The University Of California

Inventor： Schmid, Andreas ,  Andresen, Nord

IPC: H01J37/20 ,  H01L41/09

CPC classification number: H02N2/0095 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/28 ,  Y10T74/20348

Abstract: The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the manipulator comprising a base (2), and attachment means ( 30 ) for attaching the specimen holder to the manipulator, characterized in that the manipulator further comprises at least three nano-actuators (3 a , 3 b , 3 c ) mounted on the base, each nano-actuator showing a tip (4 a , 4 b , 4 c ), the at least three tips defining the y-z plane, each tip capable of moving with respect to the base in the y-z plane; a platform (5) in contact with the tips of the nano-actuators; and clamping means (6) for pressing the platform against the tips of the nano-actuators; as a result of which the nano-actuators can rotate the platform with respect to the base in the y-z plane and translate the platform parallel to the y-z plane.

公开(公告)号：EP1955351A2

公开(公告)日：2008-08-13

申请号：EP06837735.7

申请日：2006-11-15

Applicant: Alis Corporation

Inventor： WARD, Billy W. ,  NOTTE IV, John A. ,  FARKAS III, Louis, S. ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  GROHOLSKI, Alexander ,  COMUNALE, Richard

IPC: H01J9/02

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).

公开(公告)号：EP2811288A1

公开(公告)日：2014-12-10

申请号：EP13170871.1

申请日：2013-06-06

Applicant: FEI COMPANY

Inventor： Luecken, Uwe ,  Schoenmakers, Remco ,  Van den Oetelaar, Johannes

IPC: G01N23/04

CPC classification number: H01J37/20 ,  G01N23/046 ,  H01J37/22 ,  H01J37/28 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20264 ,  H01J2237/20285 ,  H01J2237/2802

Abstract: The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50 - 100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.

Abstract translation: 本发明涉及电子断层摄影的改进方法。 电子断层摄影是一个耗时的过程，因为必须获取通常在50-100张图像之间的大量图像，以形成一个断层图像。 本发明教导了一种方法，通过不断地逐步倾斜样本来缩短通过连续倾斜样本来更快速地获取这一数量图像所需的时间。 因此，消除了在步骤之间减少振动所需的时间。

公开(公告)号：EP2416343A3

公开(公告)日：2013-06-05

申请号：EP11182566.7

申请日：2006-11-15

Applicant: Alis Corporation

Inventor： Mantz, Ulrich ,  Steigerwald, Michael ,  Ward, Billy W. ,  Notte, John A. ,  Farkas, Louis ,  Percival, Randall ,  Hill, Raymond

IPC: H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B81B1/00 ,  H01J27/26 ,  B82Y10/00 ,  H01J37/20

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: The present invention refers to a system, comprising a scanning electron microscope capable of providing an electron beam and a gas field ion source (120) capable of interacting with a gas (182) to generate an ion beam (192). The scanning electron microscope and the gas field ion microscope (100) are positioned so that, during use, both the electron beam and the ion beam can be used to investigate a sample (180). A system according to the present invention also comprises a focused ion beam instrument.
The figure published with the abstract only shows the gas field ion microscope (100).

Abstract translation: 本发明涉及一种系统，其包括能够提供电子束的扫描电子显微镜和能够与气体（182）相互作用以产生离子束（192）的气体场离子源（120）。 扫描电子显微镜和气体场离子显微镜（100）的位置使得在使用过程中，电子束和离子束都可用于研究样品（180）。 根据本发明的系统还包括聚焦离子束仪器。 与摘要一起公布的数字仅显示气田离子显微镜（100）。

公开(公告)号：EP2293319A4

公开(公告)日：2012-08-01

申请号：EP09770068

申请日：2009-06-11

Applicant: HITACHI HIGH TECH CORP

Inventor： TERADA SHOHEI ,  TANIGUCHI YOSHIFUMI

IPC: H01J37/20 ,  G01N23/04 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/201 ,  H01J2237/20264 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/2802

公开(公告)号：EP1987530B1

公开(公告)日：2012-04-11

申请号：EP07730998.7

申请日：2007-02-16

Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)

Inventor： GIERAK, Jacques

IPC: B82B3/00

CPC classification number: H01J37/20 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G01Q80/00 ,  H01J37/3174 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20264 ,  H01J2237/244 ,  H01J2237/31732 ,  H01J2237/31737 ,  H01J2237/31755 ,  H01J2237/31788

Abstract: Nanofabrication installation comprising: a specimen holder, for holding a specimen; a mask, having a through-opening between the upper and lower faces of the mask, for letting charged particles through onto the specimen holder; a near-field detection device for detecting a relative position between the mask (8) and the specimen holder (3); and a displacement device for generating a relative movement between the mask (8) and the specimen holder (3) independently of the relative position between the source (1) and the mask (8), the mask including at least a first electrode in the through-opening (10).