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43 条记录 (耗时 0.013 秒)

    FILM FORMING DEVICE
    1.
    发明公开
    FILM FORMING DEVICE 有权
    VORRICHTUNG ZUR FILMFORMUNG

    公开(公告)号：EP3006596A4

    公开(公告)日：2017-03-01

    申请号：EP14804632

    申请日：2014-05-08

    申请人： KK KOBE SEIKO SHO (KOBE STEEL LTD )

    发明人： SEGAWA TOSHIKI ,  OHBA NAOKI ,  KUROKAWA YOSHINORI

    IPC分类号： C23C14/56 ,  C23C16/54 ,  H01J37/32 ,  H01J37/34 ,  H01L21/67

    CPC分类号： H01J37/3277 ,  C23C14/562 ,  H01J37/32513 ,  H01J37/32733 ,  H01J37/32807 ,  H01J37/3288 ,  H01J37/32899 ,  H01J37/3417 ,  H01J37/3447 ,  H01J2237/162 ,  H01J2237/20278 ,  H01J2237/332 ,  H01L21/67132

    摘要： Provided is a deposition device which can secure work space without vertical overlap of the deposition unit and the units upstream and downstream thereof. This deposition device is provided with a deposition unit (16), and upstream and downstream units (14, 18) arranged to the left and right thereof. The deposition unit (16) is provided with: a deposition roller (70); multiple guide rollers (72); a main chamber (64) having a deposition roller housing unit (74) and, thereabove, a guide roller housing unit (76); first and second process chambers (66, 68) which house multiple deposition process devices (84, 86) to the left and right of the deposition roller housing unit (74); and process chamber support units (104) for supporting the first and second process chambers (66, 68) so as to allow the first and second process chambers (66, 68) to move between a regular position for deposition and a retracted position retracted to the left or right, and between the retracted position and an exposure position separated in the front/back direction.

    摘要翻译： 提供了一种沉积装置，其能够确保工作空间而不沉积单元与其上游和下游单元的垂直重叠。 该沉积装置设置有沉积单元（16）以及布置在其左侧和右侧的上游和下游单元（14,18）。 沉积单元（16）设置有：沉积辊（70）; 多个导辊（72）; 具有沉积辊容纳单元（74）的主室（64），以及上面的导辊容纳单元（76）; 第一和第二处理室（66,68），其将多个沉积处理装置（84,86）容纳在沉积辊壳体单元（74）的左侧和右侧; 和用于支撑第一和第二处理室（66,68）的处理室支撑单元（104），以允许第一和第二处理室（66,68）在用于沉积的常规位置和被缩回到 左侧或右侧，以及在缩回位置与在前/后方向上分离的曝光位置之间。

    NANOROBOTIK-MODUL, AUTOMATISIERUNG UND WECHSEL
    5.
    发明公开
    NANOROBOTIK-MODUL, AUTOMATISIERUNG UND WECHSEL 审中-公开
    NANOROBOTIK-MODUL，AUTOMATISIERUNG UND WECHSEL

    公开(公告)号：EP2140226A2

    公开(公告)日：2010-01-06

    申请号：EP08757972.8

    申请日：2008-04-24

    申请人： Klocke, Volker

    发明人： KLOCKE, Volker

    IPC分类号： G01B21/20 ,  G01B21/04 ,  H01J37/26 ,  B21J19/00 ,  B25J15/00 ,  G01N13/10 ,  G12B21/22

    CPC分类号： G01Q10/02 ,  G01B21/04 ,  G01Q10/04 ,  G01Q30/04 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/2025 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/28

    摘要： The invention relates to a nanorobot module with a measuring device for measuring spatial surface properties with a measuring in the centimetre range and a resolution in the nanometre range which can be arranged in a vacuum chamber, for example, the vacuum chamber of a microscope. In addition to the integration of the nanorobot module in a vacuum chamber, the invention further relates to the automation of the module in the chamber system, in particular, the connection of the control of the nanorobot system and chamber system by providing an interface between both systems. The invention also relates to a mechatronic exchange adapter for the flexible fixing of nanorobot modules within a vacuum chamber, in particular an exchange adapter which preferably connects a nanorobot module in a working stage and mechanically locates the same with high precision without play.

    摘要翻译： 一种具有用于测量空间表面性质的测量装置的纳米机器人模块，其具有在厘米范围内的测量范围和纳米范围内的分辨率，其可以布置在真空室中，例如显微镜的真空室中。 随着将纳米机器人模块集成到真空室中，本公开还涉及腔室系统中的模块的自动化，特别是通过提供纳米机器人系统的控制器与腔室系统的连接， 两个系统。 最后，本发明涉及用于在真空室内灵活固定纳米机器人模块的机电一体式交换适配器，特别地，本发明涉及一种交换适配器，其优选地在一个过程中电连接纳米机器人模块并机械地固定它，使得它是 引导高精度，不发挥。

    Motorized manipulator for positioning a TEM specimen
    6.
    发明公开
    Motorized manipulator for positioning a TEM specimen 审中-公开
    Motorisierter机械手zur Positionierung einer TEM-Probe

    公开(公告)号：EP2051280A1

    公开(公告)日：2009-04-22

    申请号：EP07120125.5

    申请日：2007-11-07

    申请人： The Regents of the University of California

    发明人： Schmid, Andreas

    IPC分类号： H01J37/20 ,  H01L41/09

    CPC分类号： H02N2/0095 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/28 ,  Y10T74/20348

    摘要： The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the manipulator comprising a base (2), and attachment means ( 30 ) for attaching the specimen holder to the manipulator, characterized in that the manipulator further comprises at least three nano-actuators (3 a , 3 b , 3 c ) mounted on the base, each nano-actuator showing a tip (4 a , 4 b , 4 c ), the at least three tips defining the y-z plane, each tip capable of moving with respect to the base in the y-z plane; a platform (5) in contact with the tips of the nano-actuators; and clamping means (6) for pressing the platform against the tips of the nano-actuators; as a result of which the nano-actuators can rotate the platform with respect to the base in the y-z plane and translate the platform parallel to the y-z plane.

    摘要翻译： 本发明涉及一种用于定位与yz平面平行的亚微米分辨率的TEM样本保持器并将样本架旋转在yz平面中的机动操纵器，所述操纵器包括基座（2）和附接装置（30），用于附接 所述样本保持器到所述操纵器，其特征在于，所述操纵器还包括安装在所述基座上的至少三个纳米致动器（3a，3b，3c），每个纳米致动器显示尖端（4a，4b， c），限定yz平面的至少三个尖端，每个尖端能够相对于yz平面中的基座移动; 与纳米致动器的尖端接触的平台（5）; 以及用于将平台压靠在纳米致动器的尖端上的夹紧装置（6） 其结果是，纳米致动器可以使平台相对于基座在y-z平面中旋转，并将平台平行于y-z平面平移。

    Stage apparatus and linear motor
    8.
    发明公开
    Stage apparatus and linear motor 失效
    载台装置及线性马达

    公开(公告)号：EP1536290A3

    公开(公告)日：2005-07-06

    申请号：EP05075302.9

    申请日：1996-10-04

    申请人： Canon Kabushiki Kaisha

    发明人： Korenaga, Nobushige, Canon Kabushiki Kaisha ,  Ebinuma, Ryuichi, Canon Kabushiki Kaisha

    IPC分类号： G03F7/20 ,  H01L21/68

    CPC分类号： G03F7/70358 ,  G03F7/70725 ,  G03F7/70758 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/3175 ,  H01L21/682 ,  H02K41/031 ,  H02K41/0356

    摘要： It is an object to provide a compact, lightweight, and inexpensive stage apparatus. A stage apparatus for moving a stage (2) in a predetermined direction includes a stage accelerating/decelerating thrust generation unit (9) arranged along the moving direction, a stage speed control thrust generation unit (8) arranged to be parallel to the stage accelerating/decelerating thrust generation unit, an accelerating unit (29a) for generating a stage accelerating thrust at a portion corresponding to the stage accelerating interval of the accelerating/decelerating thrust generation unit (9), a decelerating unit (29b) for generating a stage decelerating thrust at a portion corresponding to the stage decelerating interval of the accelerating/decelerating thrust generation unit (9), and a speed control unit (28) for controlling the stage thrust generated by the speed control thrust generation unit (8) at least within a predetermined range between the accelerating interval and the decelerating interval.

    WORKPIECE TRANSPORT AND POSITIONING APPARATUS
    9.
    发明公开
    WORKPIECE TRANSPORT AND POSITIONING APPARATUS 审中-公开
    工件运输和定位设备

    公开(公告)号：EP3069367A1

    公开(公告)日：2016-09-21

    申请号：EP14859522.6

    申请日：2014-11-11

    申请人： Howard Hughes Medical Institute

    发明人： PRICE, John, H. ,  BOCK, Dravida

    IPC分类号： H01J37/20

    CPC分类号： H01J37/20 ,  G01N1/32 ,  G01N35/00732 ,  H01J37/023 ,  H01J37/185 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20278 ,  H01J2237/20285 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/26 ,  H01J2237/2602

    摘要： An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.

    摘要翻译： 一种自动化工件处理设备，包括：处理部分，其包括处理模块，该处理模块被配置用于在处理位置处处理工件;运送模块，其包括第一梭步骤，独立于第一步骤的第二梭步骤，以及末端执行器， 第一和第二阶段中的一个，末端执行器构造成保持和运输工件进出处理模块，并且具有由第一和第二阶段的组合限定的运动范围，该运动范围从工件保持件 将处理模块外部的工作站移动到处理模块内部的处理位置，使得末端执行器限定处理模块的处理阶段，以及包括装载端口模块的自动装载和运输部分，工件通过所述装载端口模块被装载到自动装载和运输部分中 并且可通信地连接到运输模块。