公开(公告)号：EP2428988A1

公开(公告)日：2012-03-14

申请号：EP11167494.1

申请日：2011-05-25

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Bae, Byeong-Soo ,  Jin, JungHo

IPC: H01L21/683

CPC classification number: H01L21/6835 ,  H01L2221/68318 ,  H01L2221/6835

Abstract: Disclosed is a method of fabricating a flexible device, which includes surface-treating one or both sides of a carrier plate (1) so that regions (2,2',2'') with different surface-treatments are formed on the same side of the carrier plate, forming a glass-filler reinforced plastic substrate film (3) on the surface-treated carrier plate, forming thin film patterns (4) on the glass-filler reinforced plastic substrate film, and separating the glass-filler reinforced plastic substrate film having the thin film patterns formed thereon from the carrier plate, and in which the surface-treating of the carrier plate enables the glass-filler reinforced plastic substrate film to be easily separated from the carrier plate without an additional process such as using a solvent or a laser release technique.

Abstract translation: 公开了一种制造柔性装置的方法，其包括对载体板（1）的一侧或两侧进行表面处理，使得在同一侧上形成具有不同表面处理的区域（2,2'，2“） 的载体板上，在表面处理的载体板上形成玻璃填充剂增强的塑料基材膜（3），在玻璃填料增强塑料基材膜上形成薄膜图案（4），并分离玻璃填料增强塑料 从载体板形成有薄膜图案的基板薄膜，并且其中承载板的表面处理使得玻璃填充增强塑料基材膜能够容易地与载体板分离，而不需要额外的工艺，例如使用 溶剂或激光释放技术。