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1.NOVEL OXIMESTER FLUORINE COMPOUND, AND PHOTOPOLYMERIZATION INITIATOR AND PHOTORESIST COMPOSITION COMPRISING SAME 有权
标题翻译: 中华神经科学与发展学术研讨会(FOTOLACKZUSAMMENSETZUNG DAMIT)公开(公告)号:EP2845845A1
公开(公告)日:2015-03-11
申请号:EP13785166.3
申请日:2013-05-03
发明人: SHIN, Seung Rim , JUN, Kun , SHIN, Jong Il , PARK, Soo Youl , AN, Kyoung Lyong , LEE, Sang Oh , MOON, Bong Seok , OH, Chunrim , CHOI, Anam , SO, In-Young
IPC分类号: C07C251/66 , C07C13/567 , G03F7/004
CPC分类号: G03F7/027 , C07C251/66 , C07C251/68 , C07C2603/18 , G03F7/0007 , G03F7/031 , G03F7/105
摘要: Provided are a novel fluorene oxime ester compound, and a photopolymerization initiator and a photoresist composition containing the same.
摘要翻译: 提供了一种新颖的芴肟酯化合物和光聚合引发剂和含有它们的光致抗蚀剂组合物。
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公开(公告)号:EP2845845B1
公开(公告)日:2019-07-03
申请号:EP13785166.3
申请日:2013-05-03
发明人: SHIN, Seung Rim , JUN, Kun , SHIN, Jong Il , PARK, Soo Youl , AN, Kyoung Lyong , LEE, Sang Oh , MOON, Bong Seok , OH, Chunrim , CHOI, Anam , SO, In-Young
IPC分类号: G03F7/00 , G03F7/004 , G03F7/105 , G03F7/027 , G03F7/031 , C07C251/66 , C07C13/567 , C07C251/68
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