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    ELECTROSTATIC CHUCK
    1.
    发明公开
    ELECTROSTATIC CHUCK 审中-公开
    静电夹具

    公开(公告)号：EP3073521A1

    公开(公告)日：2016-09-28

    申请号：EP14863599.8

    申请日：2014-11-21

    申请人： Kyocera Corporation

    发明人： HORIUCHI, Masahiko

    IPC分类号： H01L21/683 ,  B23Q3/15 ,  H02N13/00

    CPC分类号： H01L21/6833 ,  H01L21/6831 ,  H01L21/6875

    摘要： An electrostatic chuck according to an embodiment is an electrostatic chuck for adsorbing an object. The electrostatic chuck includes a base body having a first surface that includes a bottom surface and a protruding surface part protruding from the bottom surface. The protruding surface part has a first top surface and a step surface disposed between the first top surface and the bottom surface.

    METHOD FOR PRODUCING ASSEMBLY
    2.
    发明公开
    METHOD FOR PRODUCING ASSEMBLY 审中-公开

    公开(公告)号：EP4317111A1

    公开(公告)日：2024-02-07

    申请号：EP22780681.7

    申请日：2022-03-28

    申请人： Kyocera Corporation

    发明人： HORIUCHI, Masahiko ,  MANOME, Takeo ,  MIYAZAKI, Shinya

    IPC分类号： C04B37/00

    摘要： A method for manufacturing a bonded body according to the present disclosure includes: obtaining a first composite that includes a first outer layer portion located on an outer surface side and containing silicon oxide as a main component, and a first inner portion surrounded by the first outer layer portion and containing silicon carbide and silicon; obtaining a second composite that includes a second outer layer portion located on an outer surface side and containing silicon oxide as a main component, and a second inner portion surrounded by the second outer layer portion and containing silicon carbide and silicon; grinding or polishing a first contact surface at which the first inner portion is in contact with the second inner portion and/or a second contact surface at which the second inner portion is in contact with the first inner portion; and bringing the first contact surface and the second contact surface into contact with each other and performing thermal treatment in a vacuum atmosphere or an inert gas atmosphere.

    PLACEMENT MEMBER AND METHOD FOR MANUFACTURING SAME
    4.
    发明公开
    PLACEMENT MEMBER AND METHOD FOR MANUFACTURING SAME 审中-公开
    VERFAHREN ZUR HERSTELLUNG DAVON的PLATZIERUNGSELEMENT

    公开(公告)号：EP2927947A1

    公开(公告)日：2015-10-07

    申请号：EP13858965.0

    申请日：2013-11-14

    申请人： Kyocera Corporation

    发明人： HORIUCHI, Masahiko

    IPC分类号： H01L21/683 ,  G03F7/20 ,  H01L21/027

    CPC分类号： H01L21/68757 ,  B05D7/52 ,  G03F7/707 ,  H01L21/6875

    摘要： A placement member (1) in accordance with an embodiment of the present invention includes a base (4) having a placement section (3) on which an object (2) is placed, and a coating film (5) that coats at least a part of the placement section (3). The placement section (3) has a bottom face (8), a plurality of projections (9) projecting from the bottom face (8), and an annular protrusion (10) that protrudes from the bottom face (8) at the same height as the plurality of projections (9) and surrounds the plurality of projections (9). The coating film (5) has a first region (15) that coats top faces (11) of the projections (9) and a second region (16) that coats a top face (13) of the annular protrusion (10) and has a smaller thickness than that of the first region (15).

    摘要翻译： 根据本发明实施例的放置构件（1）包括：基座（4），其具有放置有物体（2）的放置部分（3）;以及涂膜（5），其涂覆至少一个 放置部分（3）的一部分。 放置部（3）具有底面（8），从底面（8）突出的多个突起（9）和从底面（8）以相同高度突出的环状突起（10） 作为多个突起（9）并且围绕多个突起（9）。 涂膜（5）具有涂覆突起（9）的顶面（11）的第一区域（15）和涂覆环形突起（10）的顶面（13）的第二区域（16） 比第一区域（15）的厚度小。

    MOUNTING MEMBER
    6.
    发明公开
    MOUNTING MEMBER 审中-公开
    安装会员

    公开(公告)号：EP3196926A1

    公开(公告)日：2017-07-26

    申请号：EP15825375.7

    申请日：2015-07-22

    申请人： KYOCERA Corporation

    发明人： HORIUCHI, Masahiko

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6833 ,  G03F7/70708 ,  G03F7/70875 ,  H01L21/67103 ,  H01L21/67109 ,  H01L21/6831 ,  H01L21/6875

    摘要： A mounting member includes a body having a surface including a mounting surface on which an object is mountable, a channel arranged in the body, and a first layer arranged on an inner surface of the channel. The first layer has a higher thermal conductivity than the body.

    摘要翻译： 安装构件包括具有表面的主体，该表面包括可安装物体的安装表面，布置在主体中的通道以及布置在通道的内表面上的第一层。 第一层具有比身体更高的导热性。

    MEMBER FOR MOUNTING AND TEMPERATURE CONTROLLED MOUNTING DEVICE
    7.
    发明公开
    MEMBER FOR MOUNTING AND TEMPERATURE CONTROLLED MOUNTING DEVICE 有权
    蒙特利尔温哥华纪念馆MONTAGEVORRICHTUNG

    公开(公告)号：EP2642511A1

    公开(公告)日：2013-09-25

    申请号：EP11840929.1

    申请日：2011-11-18

    申请人： Kyocera Corporation

    发明人： HORIUCHI, Masahiko

    IPC分类号： H01L21/027 ,  G03F7/20 ,  H01L21/683

    CPC分类号： H01L21/67103 ,  G03F7/70341 ,  G03F7/707 ,  G03F7/70875

    摘要： Provided is a placement member including: a main body having a placement surface on which a sample is placed; and a plurality of heating units disposed within the main body. The plurality of heating units are individually temperature-controllable. The main body may have a non-placement surface on a side opposite of the placement surface, and the heating units may be disposed closer to the placement surface than to the non-placement surface.

    摘要翻译： 提供一种放置构件，包括：主体，其具有放置样品的放置表面; 以及设置在主体内的多个加热单元。 多个加热单元分别是温度可控的。 主体可以在与放置表面相对的一侧上具有非放置表面，并且加热单元可以布置成比非放置表面更靠近放置表面。