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1.发明公开Plasma generating method and plasma generating apparatus using said method 失效Plasmaerzeugungsverfahren und dieses Verfahren verwendende Plasmaerzeugungsvorrichtung。
公开(公告)号：EP0563899A1
公开(公告)日：1993-10-06
申请号：EP93105279.9
申请日：1993-03-30
CPC分类号： H01J37/32623 , H01J37/32165 , H01J37/3266 , H05H1/46
摘要： A plasma generating method comprises: a first step of disposing a plurality of lateral electrodes at lateral sides of a plasma generating part in a vacuum chamber (1); a second step of respectively applying, to the lateral electrodes (5,6,7,8), high frequency electric powers of which frequencies are the same as one another and of which phases are different from one another, thereby to excite, in the plasma generating part, a high frequency rotating electric field to cause electrons under translational motions in the plasma generating part to present oscillating or rotating motions; and a third step of applying, to the plasma generating part, a magnetic field substantially at a right angle to the working plane of the high frequency rotating electric field (101,102), thereby to convert the translational movement of the electrons in the plasma generating part into revolving motions under oscillating or rotating motions by which the electrons revolve in the plasma generating part. The high frequency rotating electric field and the magnetic field cause the electrons in the plasma generating part to be confined therein.
摘要翻译： 一种等离子体产生方法包括：在真空室（1）中的等离子体产生部件的侧面设置多个横向电极的第一步骤; 分别向横向电极（5,6,7,8）施加频率彼此相同且相位彼此不同的高频电力的第二步骤，从而在 等离子体产生部分，高频旋转电场，以在等离子体产生部分中的平移运动下产生电子以呈现振荡或旋转运动; 以及向所述等离子体产生部施加与所述高频旋转电场（101,102）的工作面基本成直角的磁场的第三工序，从而将等离子体产生部中的电子的平移运动 在等离子体产生部分中电子旋转的振荡或旋转运动下的旋转运动。 高频旋转电场和磁场使得等离子体产生部分中的电子被限制在其中。
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2.发明授权Plasma generating method and plasma generating apparatus using said method 失效等离子体产生方法，该方法中使用的等离子体发生装置
公开(公告)号：EP0563899B1
公开(公告)日：1997-07-30
申请号：EP93105279.9
申请日：1993-03-30
CPC分类号： H01J37/32623 , H01J37/32165 , H01J37/3266 , H05H1/46
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