公开(公告)号：EP0162909A4

公开(公告)日：1987-10-19

申请号：EP85900289

申请日：1984-11-14

Applicant: MIDAC CORP

Inventor： AUTH GERALD L

IPC: G01J3/44 ,  G01J3/453 ,  G01J5/08 ,  G01J3/00

CPC classification number: G01J3/4406 ,  G01J3/453 ,  G01N21/6489

Abstract: An apparatus, for photo-luminescent analysis of the surface of crystalline silicon, in which the photons (28) emitted from the sample (14) are passed through a two-beam (or two-arm) interferometer, having the usual beamsplitter (40), fixed mirror (42), and movable mirror (44). The interferometer output (46) is directed to a detector which is a germanium photodiode (50), cooled in a Dewar, which also cools the initial electronic circuitry to which the detector output is input. Using the disclosed apparatus, methods are available for readily eliminating the negative effect of the electron-hole-droplet phenomenon, and for utilizing the no-phonon region of the spectrum to identify otherwise unidentified impurity (or dopant) materials.

公开(公告)号：EP0258409A4

公开(公告)日：1989-12-13

申请号：EP87901938

申请日：1987-02-19

Applicant: MIDAC CORP

Inventor： AUTH GERALD L

IPC: G01B9/02 ,  G01J3/02 ,  G01J3/453 ,  G02B7/182

CPC classification number: G01J3/453 ,  G01J3/02 ,  G01J3/0291 ,  G02B7/182

Abstract: A spectrometer construction is shown in which the chassis (32) of the spectrometer is fabricated by stamping, punching, and bending sheet metal, the mirror supports (58, 66) and other elements are also formed from sheet metal. Precision locations are assured by tab and slot matching of the sheet metal parts. The mirrors in the spectrometer, other than those in the interferometer (36), are secured directly to vertical sheet-metal walls without intervening adjustments. The mirrors (54, 56, 60, 62) have unitary reflection and backing structures formed either by a diamond-cutting lathe, or by precision plastic molding.