公开(公告)号：EP2806302A4

公开(公告)日：2015-09-23

申请号：EP13738607

申请日：2013-01-17

申请人： MITSUBISHI HEAVY IND LTD ,  INST LASER TECHNOLOGY ,  UNIV OSAKA

发明人： HAMAMOTO KOICHI ,  YAMADA TAKAHIRO ,  CHOSROWJAN HAIK ,  FURUSE HIROAKI ,  FUJITA MASAYUKI ,  IZAWA YASUKAZU ,  KAWANAKA JUNJI ,  MIYANAGA NORIAKI

IPC分类号： G02B26/06 ,  G01J9/02 ,  G02F1/01 ,  H01S3/23

CPC分类号： H01S3/10053 ,  G01J9/02 ,  G02B26/06 ,  G02B27/0905 ,  G02F1/0121 ,  G02F1/21 ,  H01S3/0085 ,  H01S3/1307 ,  H01S3/2308 ,  H01S3/2383

摘要： A multi-beam combining apparatus includes a phase shifting section, a superposing section, an observing section and a phase control section. The phase shifting section generates a plurality of phase-shifted laser beams by shifting the phase of each of the plurality of laser beams. The superposing section generates a plurality of superposed laser beam by superposing the reference laser beam and each of the plurality of phase-shifted laser beams. The observing section generates interference pattern data of a spatial interference pattern which appears when observing each of the superposed laser beams. The phase control section carries out a feedback control of the phase shifts in the phase shifting section based on the interference pattern data obtained for every superposed laser beam, and thereby sets the plurality of phase-shifted laser beams to desired states.