公开(公告)号：EP2130272B1

公开(公告)日：2018-11-14

申请号：EP08744160.6

申请日：2008-03-21

申请人： Imra America, Inc.

发明人： CHO, Gyu, C. ,  BOUEVITCH, Oleg

IPC分类号： H01S3/00 ,  B23K26/04

CPC分类号： B23K26/043 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/067 ,  H01S3/2308

摘要： A laser head generating ultrashort pulses is integrated with an active beam steering device in the head. Direct linkage with an application system by means of an adequate interface protocol enables the active device to be controlled directly by the application system.

公开(公告)号：EP2415722B1

公开(公告)日：2018-10-10

申请号：EP11176815.6

申请日：2011-08-08

申请人： SCHOTT Corporation

发明人： Li, Hong ,  Hayden, Joseph S. ,  Pucilowski, Sally

IPC分类号： C03C3/062 ,  C03C3/068 ,  C03C3/17 ,  C03C3/19 ,  H01S3/17 ,  C03C4/00 ,  H01S3/16 ,  H01S3/23

CPC分类号： H01S3/175 ,  C03C3/062 ,  C03C3/068 ,  C03C3/17 ,  C03C3/19 ,  C03C4/0071 ,  H01S3/1611 ,  H01S3/1618 ,  H01S3/2308

摘要： Disclosed are the use of phosphate-based glasses as a solid state laser gain medium, in particular, the invention relates to broadening the emission bandwidth of rare earth ions used as lasing ions in a phosphate-based glass composition, where the broadening of the emission bandwidth is believed to be achieved by the hybridization of the glass network.

公开(公告)号：EP3381244A1

公开(公告)日：2018-10-03

申请号：EP15801421.7

申请日：2015-11-27

申请人： TRUMPF Lasersystems for Semiconductor Manufacturing GmbH

发明人： WISSERT, Matthias

IPC分类号： H05G2/00

CPC分类号： H05G2/008 ,  G03F7/70033 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/2308 ,  H01S3/2391

摘要： The invention relates to a driver laser arrangement (12) for an EUV radiation generating device (1), comprising: a beam source (2) configured to generate a first laser pulse (11a) having a first wavelength (λ
1 ) and a second laser pulse (11b) having a second wavelength (λ
2 ), and an amplifier arrangement (3) having at least one optical amplifier (4a-c) for amplifying the first laser pulse (11a) and the second laser pulse (11b). The amplifier arrangement (3) comprises at least one wavelength-selective optical element (13a, 13b) configured to attenuate the first laser pulse (11a) at the first wavelength (λ
1 ) to a greater extent than the second laser pulse (11b) at the second wavelength (λ
2 ).

公开(公告)号：EP2492735B2

公开(公告)日：2018-09-05

申请号：EP12156593.1

申请日：2008-11-19

申请人： Fianium Limited

发明人： Clowes, John ,  Grudinin, Anatoly ,  Godfrey, Ian

IPC分类号： G01N21/64 ,  G02F1/365 ,  G02B21/16

CPC分类号： H01S3/11 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6441 ,  G01N2201/0697 ,  G02B21/16 ,  G02F1/353 ,  G02F1/365 ,  G02F2001/3528 ,  H01S3/10 ,  H01S3/10046 ,  H01S3/1024 ,  H01S3/108 ,  H01S3/2308

摘要： An optical pulse source 30 comprising a DPSS pump laser 31, a photonic crystal fibre (PCF) 35 and acousto-optic modulator (AOM) gating means 33. The pump pulses are coupled through lenses 32 to the AOM 33, synchronised to the pump laser 31 and operable to gate the pump pulses to a reduced repetition rate Rr = Rf/N, where Rf is the pump laser fundamental frequency. The pulses from the AOM 33 are injected via optics 34 into the PCF 35. Propagation through the PCF 35 causes the pulses to broaden spectrally to produce supercontinuum pulses. An optical pulse source comprising the optical pulse source 30 and an acousto-optical tunable filter (AOTF) operable to convert supercontinuum pulses into wavelength variable output pulses is also provided. A method of scaling the energy of the optical supercontinuum pulses is also provided.

公开(公告)号：EP2947728B1

公开(公告)日：2018-04-18

申请号：EP14425061.0

申请日：2014-05-23

申请人： Padtec S.A.

发明人： Meli, Fausto ,  Righetti, Aldo ,  Grasso, Giorgio

IPC分类号： H01S3/067 ,  H01S3/0941 ,  H01S3/13 ,  H01S3/00 ,  H04B10/291 ,  H01S3/094 ,  H04B10/294

CPC分类号： H01S3/06779 ,  H01S3/0064 ,  H01S3/06758 ,  H01S3/091 ,  H01S3/094011 ,  H01S3/094061 ,  H01S3/0941 ,  H01S3/1301 ,  H01S3/2308 ,  H01S2301/04 ,  H04B10/2912 ,  H04B10/294 ,  H04J14/0221 ,  H04Q11/0005 ,  H04Q2011/0013 ,  H04Q2011/0016

摘要： An optical amplifier (1), and a related optical amplification method, comprising an optical path (2) having an input end (3) and an output end (4), a first erbium doped optical fiber (5) placed along the optical path, a first gain flatting filter (6) placed along the optical path downstream the first erbium doped optical fiber, a second erbium doped optical fiber (7) placed along the optical path downstream the first gain flatting filter, a second gain flatting filter (8) placed along the optical path downstream the second erbium doped optical fiber, a third erbium doped optical fiber (9) placed along the optical path downstream the second gain flatting filter, and an optical pump (10) optically coupled to the optical path so as to optically pump at least the first and the third erbium doped optical fiber.

公开(公告)号：EP2617514A4

公开(公告)日：2018-01-03

申请号：EP11825100

申请日：2011-09-09

申请人： SUMITOMO ELECTRIC INDUSTRIES

发明人： KAKUI MOTOKI

IPC分类号： B23K26/00 ,  B23K26/073 ,  B23K26/361 ,  B23K26/40 ,  H01L31/0463 ,  H01S5/04

CPC分类号： H01S5/0427 ,  B23K26/0063 ,  B23K26/0732 ,  B23K26/361 ,  B23K26/40 ,  B23K2203/172 ,  B23K2203/50 ,  H01L31/0463 ,  H01S3/06754 ,  H01S3/1618 ,  H01S3/2308 ,  H01S2301/20 ,  Y02E10/50

摘要： The present invention relates to a laser processing method that is capable of performing high-throughput processing by using an inexpensive pulsed laser light source. A pulsed laser light source 1 that is favorably used in this laser processing method has a seed light source, an amplifying optical fiber, a bandpass filter and the like, as well as a MOPA structure. The laser processing method is a method of processing a metal thin film formed on a transparent substrate by radiating pulsed light onto the metal thin film, and has the steps of repeatedly outputting the pulsed light by directly modulating a semiconductor laser of the seed light source in accordance with electric signals, amplifying the pulsed light using an optical amplifier including an optical amplification medium, controlling the full width at half maximum of the pulsed light that is amplified and outputted by the optical amplifier to be 0.5 ns or shorter, and removing the metal thin film by radiating the pulsed light thus having the controlled full width at half maximum onto the metal thin film through the transparent substrate.

公开(公告)号：EP2528172B1

公开(公告)日：2017-08-16

申请号：EP12168487.2

申请日：2012-05-18

申请人： Omron Corporation

发明人： Ogaki, Tatsuo

IPC分类号： H01S3/067 ,  H01S3/131 ,  H01S3/10 ,  H01S3/13 ,  H01S3/091 ,  H01S3/0941 ,  B23K26/06 ,  H01S3/23 ,  H01S3/16 ,  H01S3/094

CPC分类号： H01S3/06754 ,  H01S3/06758 ,  H01S3/094007 ,  H01S3/10069 ,  H01S3/1301 ,  H01S3/1306 ,  H01S3/1618 ,  H01S3/2308

公开(公告)号：EP2727200B1

公开(公告)日：2017-08-09

申请号：EP12804856.8

申请日：2012-06-21

申请人： Cymer, LLC

发明人： JIANG, Rui ,  THORNES, Joshua, J. ,  RIGGS, Daniel, J. ,  O'BRIEN, Kevin, M.

IPC分类号： H01S3/22 ,  H01S3/23 ,  H01S3/225 ,  H01S3/036

CPC分类号： H01S3/036 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366

公开(公告)号：EP3188326A1

公开(公告)日：2017-07-05

申请号：EP16199163.3

申请日：2016-11-16

申请人： Lumentum Operations LLC

发明人： AMMANN, Hubert ,  BENETTI, Marco

IPC分类号： H01S3/00 ,  H01S3/10 ,  H01S3/23

CPC分类号： H01S3/0941 ,  H01S3/0085 ,  H01S3/0092 ,  H01S3/10015 ,  H01S3/1003 ,  H01S3/10046 ,  H01S3/11 ,  H01S3/2308 ,  H01S3/2325 ,  H01S3/235 ,  H01S3/2375

摘要： A device may include a transient optical amplifier (708) having stored energy associated with a lower boundary and an upper boundary of a dynamic equilibrium, and a target level defining stored energy for amplifying a high energy input pulse to a higher energy output pulse. The device may include a pump to increase the amplifier's stored energy, and a source (702) to pass low energy control pulses (705) or the high energy input pulse (707) to the amplifier (708). The device may include a controller (712) configured to maintain the amplifier's stored energy in the dynamic equilibrium by requesting low energy control pulses for the amplifier at a high repetition frequency. The controller may wait to receive a trigger. Based on receiving the trigger, the device may stop passing low energy control pulses to the amplifier, and may pass the high energy input pulse to the amplifier when the amplifier's stored energy reaches the target level. Pulse on demand from a high frequency pulsed laser is realized by continuous pumping of an amplifier and control of the gain by providing comparably low energy pulses at a repetition rate higher than the reciprocal fluorescence lifetime of the amplifier gain medium. The control pulses control the amount of population inversion of the amplifier. A pulse picker (706) may be used to provide the control pulses with adjustable amplitude to the amplifier and a second pulse picker (710) may be used to discriminate a single pulse (713) from the train of pulses comprising the amplified high energy pulse (711) and the amplified high energy pulse (713) from the amplified low energy control pulses (709).

摘要翻译： 装置可以包括具有与动态平衡的下边界和上边界相关联的存储的能量的瞬态光放大器（708）以及定义用于将高能量输入脉冲放大为较高能量输出脉冲的存储能量的目标电平。 该设备可以包括用于增加放大器的存储能量的泵，以及用于将低能量控制脉冲（705）或高能量输入脉冲（707）传递给放大器（708）的源（702）。 该设备可以包括控制器（712），该控制器被配置为通过以高重复频率请求用于放大器的低能量控制脉冲来将放大器的存储能量保持在动态平衡中。 控制器可能会等待接收触发器。 基于接收到触发，设备可以停止向放大器传递低能量控制脉冲，并且可以在放大器的存储能量达到目标水平时将高能量输入脉冲传递给放大器。 通过连续泵浦放大器并通过以高于放大器增益介质的互逆荧光寿命的重复频率提供相对较低的能量脉冲来控制增益，从而实现高频脉冲激光器的按需脉冲。 控制脉冲控制放大器的总体反转量。 可以使用脉冲选择器（706）来向放大器提供具有可调幅度的控制脉冲，并且可以使用第二脉冲选择器（710）来从包括放大的高能脉冲（71）的脉冲序列中区分出单个脉冲（713） （711）和来自放大的低能量控制脉冲（709）的放大的高能量脉冲（713）。

公开(公告)号：EP2745170B1

公开(公告)日：2017-06-28

申请号：EP12823509.0

申请日：2012-08-16

申请人： Institut National de la Recherche Scientifique

发明人： SCHMIDT, Bruno E. ,  LÉGARÉ, François ,  IBRAHIM, Heide

IPC分类号： G02F1/39 ,  G02B27/10 ,  H01S3/09 ,  G02B27/30 ,  G02B5/18 ,  H03F7/00

CPC分类号： H01S3/10038 ,  G02F1/39 ,  G02F2001/3507 ,  G02F2001/392 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/2308 ,  H01S3/2383 ,  H03F7/00