公开(公告)号：EP3004819A4

公开(公告)日：2017-05-24

申请号：EP14804678

申请日：2014-07-31

Applicant: MKS TECH INC

Inventor： WATSON MARK ,  BULLER SHANE ,  CARRON KEITH

IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44 ,  G01N21/64 ,  G02B21/00 ,  G02B26/10

CPC classification number: G01N21/65 ,  G01J3/021 ,  G01J3/0289 ,  G01J2003/4424 ,  G01N21/658 ,  G01N2021/6417 ,  G01N2201/0221 ,  G02B21/002 ,  G02B26/10

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

Abstract translation: 提供分光计。 在一个实施方式中，例如，光谱仪包括激发源，聚焦透镜，可移动反射镜和致动器组件。 聚焦透镜适于聚焦来自激发源的入射光束。 致动器组件适于控制可移动反射镜以将聚焦的入射光束移动穿过样本的表面。