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公开(公告)号：EP2568177B1
公开(公告)日：2015-10-21
申请号：EP12183361.0
申请日：2012-09-06
IPC分类号： F04B43/04 , F04B45/047
CPC分类号： F04B43/043 , F04B45/047
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公开(公告)号：EP2568177A1
公开(公告)日：2013-03-13
申请号：EP12183361.0
申请日：2012-09-06
IPC分类号： F04B43/04 , F04B45/047
CPC分类号： F04B43/043 , F04B45/047
摘要： A fluid control device (101) includes a vibrating plate (141) including a first main surface and a second main surface, a driver (142) that is provided on the first main surface of the vibrating plate and vibrates the vibrating plate, and a plate (151, 451) that is provided on the second main surface of the vibrating plate and has a hole (152) provided thereon. At least one of either the vibrating plate or the plate is positioned between the hole and a region of the vibrating plate facing the hole, and includes a projection (143) projecting in a direction intermediate between the hole and the region of the vibrating plate facing the hole.
摘要翻译： 本发明的流体控制装置（101）具备：具有第一主面和第二主面的振动板（141）;驱动器（142），其设置于振动板的第一主面并使振动板振动; 设置在振动板的第二主表面上并具有设置在其上的孔（152）的板（151,451）。 振动板或板中的至少一个位于孔和面向孔的振动板的区域之间，并且包括突出部（143），突出部（143）在孔和面对振动板的区域之间的中间方向上突出 洞。
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公开(公告)号：EP2568176A1
公开(公告)日：2013-03-13
申请号：EP12183355.2
申请日：2012-09-06
IPC分类号： F04B43/04 , F04B45/047
CPC分类号： F04B43/043 , F04B45/047
摘要： A fluid control device (101) includes a vibrating plate unit (160), a driver (142), a flexible plate (151), and a base plate (191). The vibrating plate unit (160) includes a vibrating plate (141) including first and second main surfaces, and a frame plate (161) surrounding the surrounding of the vibrating plate (141). The driver (142) is bonded to the first or the second main surface of the vibrating plate (141) and vibrates the vibrating plate. The flexible plate (151) includes a hole provided therein, and is bonded to the frame plate so as to face the vibrating plate. The base plate (191) is bonded to the main surface of the flexible plate (151) on a side opposite to the vibrating plate. A size relationship between the coefficients of linear expansion of the material of the base plate and the frame plate is equal to a size relationship between the coefficients of linear expansion of the material of the vibrating plate and the driver.
摘要翻译： 流体控制装置（101）包括振动板单元（160），驱动器（142），柔性板（151）和底板（191）。 振动板单元（160）包括具有第一和第二主表面的振动板（141）以及围绕振动板（141）的周围的框架板（161）。 驱动器（142）粘合到振动板（141）的第一或第二主表面并振动振动板。 挠性板151包括设置在其中的孔，并且结合到框板以面对振动板。 基板191在振动板的相反侧与挠性板151的主面接合。 基板的材料和框板的线膨胀系数之间的尺寸关系等于振动板的材料和驱动器的线膨胀系数之间的尺寸关系。
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公开(公告)号：EP3604810A1
公开(公告)日：2020-02-05
申请号：EP19198063.0
申请日：2015-02-19
发明人： Hirata, Atsuhiko , Kodama, Yukiharu
IPC分类号： F04B43/02 , F04B43/04 , F04B45/04 , H02N2/00 , F04B45/047
摘要： A pump (1) includes a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23 to 26), a piezoelectric element (16) that is stacked over the central part (21) and configured to cause flexural vibrations to occur concentrically from the central part (21) to the connecting parts (23 to 26), and an opposed plate (13) that is stacked over the frame part (22) and positioned facing each of the connecting parts (23 to 26) with a spacing therebetween. The vibrating plate (15) has such a resonant mode that an antinode occurs in each of the central part (21) and the connecting parts (23 to 26). The opposed plate (13) has, at positions facing the connecting parts (23 to 26), a plurality of channel holes (39 to 43) through which a fluid flows.
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公开(公告)号：EP2568174A1
公开(公告)日：2013-03-13
申请号：EP12183346.1
申请日：2012-09-06
IPC分类号： F04B43/04 , F04B45/047
CPC分类号： F04B43/046 , F04B45/047 , F04D33/00
摘要： A fluid control device (101) includes a vibrating plate unit (160), a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate (141) with first and second main surfaces, a frame plate (161) surrounding the vibrating plate (141), and a link portion (162) linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver (142) is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole (152) faces the second main surface of the vibrating plate (141), being fixed to the frame plate (161). At least a portion of the vibrating plate (141) and the link portion (162) are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.
摘要翻译： 流体控制装置（101）包括振动板单元（160），驱动器和柔性板。 所述振动板单元包括具有第一和第二主表面的振动板（141），围绕所述振动板（141）的框架板（161）和连接所述振动板和所述框架板的弹性支撑 振动板抵靠框架板。 驱动器（142）位于振动板的第一主表面上，并使振动板振动。 所述柔性板具有与振动板（141）的第二主面相对的孔（152），固定在框架板（161）上。 所述振动板（141）和所述连接部（162）的至少一部分比所述框架板的厚度薄，使得所述振动板的所述部分的表面和所述连接部的所述柔性板 ，可以从柔性板分离。
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公开(公告)号：EP1395105A2
公开(公告)日：2004-03-03
申请号：EP03255397.6
申请日：2003-08-29
发明人： Hirata, Atsuhiko
IPC分类号： H05K13/04
CPC分类号： H05K13/0408 , Y10T29/53178
摘要： A component-placing apparatus for driving a nozzle in the rotational and vertical directions for applying suction to a component includes a rotary actuator and a linear actuator having a stator connected to a stator of the rotary actuator such that these stators are immovable relative to each other. A spline shaft is connected to a rotating shaft of the rotary actuator, and a nozzle connecting shaft having a suction nozzle disposed at the bottom thereof is engaged with the spline shaft and is allowed to move only rectilinearly. A hollow holder encircling the nozzle connecting shaft with rotary bearings being interposed therebetween is connected to a mover of the linear actuator, and the hollow holder is engaged with the stator of the linear actuator with a linear guide being interposed therebetween.
摘要翻译： 一种用于在旋转和垂直方向上驱动喷嘴以向部件施加抽吸的部件放置设备包括旋转致动器和线性致动器，该线性致动器具有连接到旋转致动器的定子的定子，使得这些定子相对于彼此不可移动 。 花键轴连接到旋转致动器的旋转轴，并且其底部具有吸嘴的喷嘴连接轴与花键轴接合并且仅允许直线移动。 在线性致动器的动子上连接有夹着旋转轴承而包围喷嘴连接轴的中空的支架，线性致动器的定子通过直线引导件与空心支架卡合。
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公开(公告)号：EP2573396B1
公开(公告)日：2017-12-20
申请号：EP12196133.8
申请日：2007-07-09
发明人： Hirata, Atsuhiko , Kanai, Shungo , Kamitani, Gaku
IPC分类号： F04B43/04 , H01L41/047 , H01L41/257 , H01L41/083 , H01L41/09
CPC分类号： F04B43/046 , H01L41/0471 , H01L41/083 , H01L41/0973 , H01L41/257
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公开(公告)号：EP2568174B1
公开(公告)日：2017-12-13
申请号：EP12183346.1
申请日：2012-09-06
IPC分类号： F04B43/04 , F04B45/047 , F04B43/00 , F04D33/00
CPC分类号： F04B43/046 , F04B45/047 , F04D33/00
摘要： A fluid control device (101) comprises: a vibrating plate (141) including a first main surface and a second main surface; a frame plate (161) that surrounds the vibrating plate (141); a driver (142) provided on the first main surface of the vibrating plate; and a flexible plate (151) that includes a hole (152) facing the second main surface of the vibrating plate (141) and is fixed to the frame plate (161). The fluid control device further includes a plurality of link portions (162) that link the vibrating plate (141) and the frame plate (161) and elastically support the vibrating plate (141) against the frame plate (161) with a gap between the frame plate (161) and the vibrating plate (141); wherein the plurality of link portions (162) connect a portion of the vibrating plate (141) and the frame plate (161) across the gap; and the flexible plate (151) includes a hole portion (198) formed in a region in which the flexible plate (151) faces the plurality of the link portions (162).
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公开(公告)号：EP2568176B1
公开(公告)日：2014-01-29
申请号：EP12183355.2
申请日：2012-09-06
IPC分类号： F04B43/04 , F04B45/047
CPC分类号： F04B43/043 , F04B45/047
摘要： A fluid control device (101) includes a vibrating plate unit (160), a driver (142), a flexible plate (151), and a base plate (191). The vibrating plate unit (160) includes a vibrating plate (141) including first and second main surfaces, and a frame plate (161) surrounding the surrounding of the vibrating plate (141). The driver (142) is bonded to the first or the second main surface of the vibrating plate (141) and vibrates the vibrating plate. The flexible plate (151) includes a hole provided therein, and is bonded to the frame plate so as to face the vibrating plate. The base plate (191) is bonded to the main surface of the flexible plate (151) on a side opposite to the vibrating plate. A size relationship between the coefficients of linear expansion of the material of the base plate and the frame plate is equal to a size relationship between the coefficients of linear expansion of the material of the vibrating plate and the driver.
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公开(公告)号：EP2573396A2
公开(公告)日：2013-03-27
申请号：EP12196133.8
申请日：2007-07-09
发明人： Hirata, Atsuhiko , Kanai, Shungo , Kamitani, Gaku
IPC分类号： F04B43/04 , H01L41/09 , H01L41/257
CPC分类号： F04B43/046 , H01L41/0471 , H01L41/083 , H01L41/0973 , H01L41/257
摘要： A piezoelectric pump comprises a pump body with a pump chamber and a piezoelectric element supported by the pump body so as to close the pump chamber and bent by voltage application so as to change the volume of the pump chamber. The piezoelectric element is of the bimorph type in which a plurality of piezoelectric layers is laminated. A diaphragm for separating the piezoelectric element from the pump chamber is bonded to a surface of the piezoelectric element adjacent to the pump chamber in face-to-face relationship. An inversion plane of the piezoelectric element alone, expansion/contraction directions of the piezoelectric element being inverted at the inversion plane, matches a neutral plane of the piezoelectric element and the diaphragm bonded to each other.
摘要翻译： 压电泵包括具有泵室的泵体和由泵体支撑的压电元件，以便关闭泵室并通过施加电压弯曲以改变泵室的体积。 压电元件是双层压电晶片型，其中多个压电层被层叠。 用于将压电元件与泵室分离的隔膜以面对面的关系结合到与泵室相邻的压电元件的表面。 单独的压电元件的反转面，压电元件在反转面反转的膨胀/收缩方向与压电元件的中性平面和彼此接合的隔膜相匹配。
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