WAVEFRONT MEASUREMENT DEVICE AND WAVEFRONT MEASUREMENT SYSTEM

    公开(公告)号:EP3730917A1

    公开(公告)日:2020-10-28

    申请号:EP18901530.8

    申请日:2018-01-19

    IPC分类号: G01M11/02 G01J9/00

    摘要: The wavefront measurement device performs: generating a first pupil function at a reference wavelength based on input data of a wavefront aberration; calculating a first image plane amplitude at a reference wavelength based on the first pupil function; generating a second pupil function at a multi-wavelength region; calculating a second image plane amplitude at the multi-wavelength region based on the second pupil function; correcting a measured point spread function using the first and second image plane amplitudes; applying a constraint condition using the corrected point spread function to the first image plane amplitude to correct the first image plane amplitude; generating a third pupil function based on the corrected first image plane amplitude; and calculating a wavefront aberration on a pupil plane based on the third pupil function.