公开(公告)号：EP3007357B1

公开(公告)日：2019-05-01

申请号：EP14804827.5

申请日：2014-05-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： KIKUCHI, Taku ,  FUKUSHIMA, Masahiro

IPC: H03H9/02 ,  H03H9/10 ,  H03H9/145 ,  H01L23/02 ,  H01L23/08

公开(公告)号：EP3007357A1

公开(公告)日：2016-04-13

申请号：EP14804827.5

申请日：2014-05-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： KIKUCHI, Taku ,  FUKUSHIMA, Masahiro

IPC: H03H9/25 ,  H01L23/02 ,  H01L23/08

CPC classification number: H03H9/25 ,  H03H9/02559 ,  H03H9/02574 ,  H03H9/02834 ,  H03H9/02897 ,  H03H9/02929 ,  H03H9/02992 ,  H03H9/1042 ,  H03H9/1071 ,  H03H9/14541

Abstract: The interior of a surface acoustic wave device is maintained in an airtight condition even when thermal stress generated in the device in an environment subjected to temperature variations. The surface acoustic wave device (1) includes a piezoelectric substrate (11), a dielectric film (12), IDT electrodes (13, 14), and a resin member (15). The surface acoustic wave device (1) includes a resin contact region (RC) where the piezoelectric substrate (11) and the resin member (15) are in direct contact with each other. The resin contact region (RC) has a shape surrounding the IDT electrodes (13, 14). Because the resin member (15) exhibits a strong adhesion force with respect to the piezoelectric substrate (11), peeling-off between the piezoelectric substrate (11) and the resin member (15) can be suppressed, and an airtight condition can be maintained in the interior of the surface acoustic wave device (1).

Abstract translation: 即使在受到温度变化的环境中的装置中产生的热应力，表面声波装置的内部也保持在气密状态。 表面声波装置（1）包括压电基板（11），电介质膜（12），IDT电极（13,14）和树脂部件（15）。 表面声波装置（1）包括压电基板（11）和树脂构件（15）彼此直接接触的树脂接触区域（RC）。 树脂接触区域（RC）具有围绕IDT电极（13,14）的形状。 由于树脂构件（15）相对于压电基板（11）具有很强的粘附力，因此可以抑制压电基板（11）和树脂构件（15）之间的剥离，并且可以保持气密状态 在声表面波装置（1）的内部。