公开(公告)号：EP1291317A3

公开(公告)日：2005-04-06

申请号：EP02256013.0

申请日：2002-08-29

申请人： NGK INSULATORS, LTD.

发明人： Takeuchi, Yukihisa, NGK Insulators, Ltd. ,  Nanataki, Tsutomu, NGK Insulators, Ltd. ,  Kimura, Koji, NGK Insulators, Ltd. ,  Takahashi, Masao, NGK Insulators, Ltd.

IPC分类号： B81B3/00 ,  H01L41/09

CPC分类号： H01L41/0973 ,  B81B3/0035 ,  G01P15/09 ,  H01L41/0477 ,  H03H9/02133 ,  H03H9/105 ,  H03H9/12 ,  H03H9/132 ,  H03H9/173 ,  H03H9/176

摘要： A ceramic device (10) has an actuator element (14) which includes a shape-retaining layer (24), an upper electrode (26a) formed on an upper portion of the shape-retaining layer (24), and a lower electrode (26b) formed on a lower portion of the shape-retaining layer (24); a vibrating section (20) of ceramics which supports the actuator element (14); and a fixed section (22) of ceramics which vibratingly supports the vibrating section (20). An electrode material of the lower electrode (26b) contacting the vibrating section (20) contains an additive in an amount of 0.01 % by weight to 20 % by weight. The electrode material contains platinum as a major component, for example. The additive such as zirconium oxide, cerium oxide, or titanium oxide is preferably used.